Fabrication of aluminum nano-scale structures using direct-embossing with a nickel template

Sang Chul Oh; Byeong Ju Bae; Ki Yeon Yang; Moo Hyun Kwon; Heon Lee

doi:10.1007/s12540-011-1012-4

Fabrication of aluminum nano-scale structures using direct-embossing with a nickel template

Sang Chul Oh, Byeong Ju Bae, Ki Yeon Yang, Moo Hyun Kwon, Heon Lee

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

Al plate was patterned by a direct embossing process. An electroformed Ni plate with a nano-sized surface protrusion pattern was used as an embossing mold. The Ni stamp with a nano-sized surface protrusion pattern was pressed onto an electro-polished Al plate; thus, a reversed Al nano-pattern was formed on the Al surface by the localized plastic deformation of Al. The Al plate was softened by annealing at 400 °C for 5 min; thus, high-fidelity pattern transfer was achieved at a low embossing pressure.

Original language	English
Pages (from-to)	771-775
Number of pages	5
Journal	Metals and Materials International
Volume	17
Issue number	5
DOIs	https://doi.org/10.1007/s12540-011-1012-4
Publication status	Published - 2011 Oct

Bibliographical note

Funding Information:
This research was supported by Business for Cooperative R&D between Industry, Academy, and Research Institute funded Korea Small and Medium Business Administration in 2010 (Grants No.000416030111) and Korea Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for Strategic Technology.

Keywords

Annealing
Deformation
Extrusion
Metals
Scanning electron microscopy (SEM)

ASJC Scopus subject areas

Condensed Matter Physics
Mechanics of Materials
Metals and Alloys
Materials Chemistry

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10.1007/s12540-011-1012-4

Cite this

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title = "Fabrication of aluminum nano-scale structures using direct-embossing with a nickel template",

abstract = "Al plate was patterned by a direct embossing process. An electroformed Ni plate with a nano-sized surface protrusion pattern was used as an embossing mold. The Ni stamp with a nano-sized surface protrusion pattern was pressed onto an electro-polished Al plate; thus, a reversed Al nano-pattern was formed on the Al surface by the localized plastic deformation of Al. The Al plate was softened by annealing at 400 °C for 5 min; thus, high-fidelity pattern transfer was achieved at a low embossing pressure.",

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note = "Funding Information: This research was supported by Business for Cooperative R&D between Industry, Academy, and Research Institute funded Korea Small and Medium Business Administration in 2010 (Grants No.000416030111) and Korea Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for Strategic Technology.",

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AU - Oh, Sang Chul

AU - Bae, Byeong Ju

AU - Yang, Ki Yeon

AU - Kwon, Moo Hyun

AU - Lee, Heon

N1 - Funding Information: This research was supported by Business for Cooperative R&D between Industry, Academy, and Research Institute funded Korea Small and Medium Business Administration in 2010 (Grants No.000416030111) and Korea Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for Strategic Technology.

PY - 2011/10

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N2 - Al plate was patterned by a direct embossing process. An electroformed Ni plate with a nano-sized surface protrusion pattern was used as an embossing mold. The Ni stamp with a nano-sized surface protrusion pattern was pressed onto an electro-polished Al plate; thus, a reversed Al nano-pattern was formed on the Al surface by the localized plastic deformation of Al. The Al plate was softened by annealing at 400 °C for 5 min; thus, high-fidelity pattern transfer was achieved at a low embossing pressure.

AB - Al plate was patterned by a direct embossing process. An electroformed Ni plate with a nano-sized surface protrusion pattern was used as an embossing mold. The Ni stamp with a nano-sized surface protrusion pattern was pressed onto an electro-polished Al plate; thus, a reversed Al nano-pattern was formed on the Al surface by the localized plastic deformation of Al. The Al plate was softened by annealing at 400 °C for 5 min; thus, high-fidelity pattern transfer was achieved at a low embossing pressure.

KW - Annealing

KW - Deformation

KW - Extrusion

KW - Metals

KW - Scanning electron microscopy (SEM)

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JO - Metals and Materials International

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ER -

Fabrication of aluminum nano-scale structures using direct-embossing with a nickel template

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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