TY - GEN
T1 - Fabrication of carbon nanotube sensor device by inkjet printing
AU - Yun, Ju Hyung
AU - Chang-Soo, Han
AU - Kim, Joondong
AU - Song, Jin Won
AU - Shin, Dong Hun
AU - Park, Young Geun
PY - 2008
Y1 - 2008
N2 - To overcome the limitation of conventional carbon nanotube fabrication techniques, inkjet printing was directly utilized on a whole wafer. In this work, inkjet printing method was used as a strong technique for the massive production of gas sensor applications. As a single wafer processing, it provided the great potential to fabricate uniform and reproducible single walled carbon nanotube (SWCNT) films on desired positions in terms of electrical characteristics and gas reaction performances. In order to secure good electrical contact between SWCNTs and the metal electrode, SWCNTs were firstly printed on a wafer with insulation layer, and then the metal electrodes were patterned by using lift-off process. The fabricated gaps of the electrodes were 2, 4, and 8 m, respectively. SWCNT films contacted tightly beneath the electrode show low and uniform electrical resistance values of 96-281 and reliable gas detection performances as well. In this work, As-deposited devices exhibit about 3% sensitivities to 100ppb - NO2 in 10 minutes and increased up to 9% by the annealing treatments at 400°C.
AB - To overcome the limitation of conventional carbon nanotube fabrication techniques, inkjet printing was directly utilized on a whole wafer. In this work, inkjet printing method was used as a strong technique for the massive production of gas sensor applications. As a single wafer processing, it provided the great potential to fabricate uniform and reproducible single walled carbon nanotube (SWCNT) films on desired positions in terms of electrical characteristics and gas reaction performances. In order to secure good electrical contact between SWCNTs and the metal electrode, SWCNTs were firstly printed on a wafer with insulation layer, and then the metal electrodes were patterned by using lift-off process. The fabricated gaps of the electrodes were 2, 4, and 8 m, respectively. SWCNT films contacted tightly beneath the electrode show low and uniform electrical resistance values of 96-281 and reliable gas detection performances as well. In this work, As-deposited devices exhibit about 3% sensitivities to 100ppb - NO2 in 10 minutes and increased up to 9% by the annealing treatments at 400°C.
KW - Carbon nanotube
KW - Gas sensor
KW - Inkjet printing
UR - http://www.scopus.com/inward/record.url?scp=50249189425&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50249189425&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2008.4484382
DO - 10.1109/NEMS.2008.4484382
M3 - Conference contribution
AN - SCOPUS:50249189425
SN - 9781424419081
T3 - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS
SP - 506
EP - 509
BT - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
T2 - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Y2 - 6 January 2008 through 9 January 2008
ER -