Fabrication of CNT/metal torsional resonator structures on GaAs

Seung Sae Hong, Jung Hoon Bak, Byung Yang Lee, Sung Woon Cho, Young Duck Kim, Seunghun Hong, Yun Daniel Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires
PublisherMaterials Research Society
Number of pages6
ISBN (Print)9781605604251
Publication statusPublished - 2007
Externally publishedYes
EventApplications of Nanotubes and Nanowires - 2007 MRS Spring Meeting - San Francisco, CA, United States
Duration: 2007 Apr 92007 Apr 13

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


OtherApplications of Nanotubes and Nanowires - 2007 MRS Spring Meeting
Country/TerritoryUnited States
CitySan Francisco, CA

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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