@inproceedings{3fa21c1ea916410fbb86e773a20fcbc5,
title = "Fabrication of CNT/metal torsional resonator structures on GaAs",
abstract = "We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.",
author = "Hong, {Seung Sae} and Bak, {Jung Hoon} and Lee, {Byung Yang} and Cho, {Sung Woon} and Kim, {Young Duck} and Seunghun Hong and Park, {Yun Daniel}",
year = "2007",
doi = "10.1557/proc-1018-ee08-12",
language = "English",
isbn = "9781605604251",
series = "Materials Research Society Symposium Proceedings",
publisher = "Materials Research Society",
pages = "105--110",
booktitle = "Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires",
note = "Applications of Nanotubes and Nanowires - 2007 MRS Spring Meeting ; Conference date: 09-04-2007 Through 13-04-2007",
}