Fabrication of electro-active polymer actuator composed of polypyrrole and solid-polymer electrolyte and its application to micropump

Seung Ki Lee; Young Choi; Woo Young Sim; Sang Sik Yang; Ho Jung An; James Jungho Pak

doi:10.1117/12.387787

Fabrication of electro-active polymer actuator composed of polypyrrole and solid-polymer electrolyte and its application to micropump

Seung Ki Lee, Young Choi, Woo Young Sim, Sang Sik Yang, Ho Jung An, James Jungho Pak

Research output: Contribution to journal › Conference article › peer-review

11 Citations (Scopus)

Abstract

Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed varying polymerization conditions and operating conditions. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm² for 120 minutes. For the application of conductive polymer actuator to micropump, silicon bulk micromachining process has been combined with polymer processes. By use of parylene diaphragm and anisotropic etching of silicon, the micropump structure composed of polypyrrole and solid polymer electrolyte has been fabricated successfully.

Original language	English
Pages (from-to)	291-299
Number of pages	9
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3987
DOIs	https://doi.org/10.1117/12.387787
Publication status	Published - 2000
Externally published	Yes
Event	Smart Structures and Materials 2000 - Electroactive Polymer Actuators and Devices (EAPAD) - Newport Beach, CA, USA Duration: 2000 Mar 6 → 2000 Mar 8

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.387787

Cite this

Fabrication of electro-active polymer actuator composed of polypyrrole and solid-polymer electrolyte and its application to micropump. / Lee, Seung Ki; Choi, Young; Sim, Woo Young et al.
In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3987, 2000, p. 291-299.

Research output: Contribution to journal › Conference article › peer-review

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abstract = "Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed varying polymerization conditions and operating conditions. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm2 for 120 minutes. For the application of conductive polymer actuator to micropump, silicon bulk micromachining process has been combined with polymer processes. By use of parylene diaphragm and anisotropic etching of silicon, the micropump structure composed of polypyrrole and solid polymer electrolyte has been fabricated successfully.",

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T1 - Fabrication of electro-active polymer actuator composed of polypyrrole and solid-polymer electrolyte and its application to micropump

AU - Lee, Seung Ki

AU - Choi, Young

AU - Sim, Woo Young

AU - Yang, Sang Sik

AU - An, Ho Jung

AU - Pak, James Jungho

PY - 2000

Y1 - 2000

N2 - Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed varying polymerization conditions and operating conditions. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm2 for 120 minutes. For the application of conductive polymer actuator to micropump, silicon bulk micromachining process has been combined with polymer processes. By use of parylene diaphragm and anisotropic etching of silicon, the micropump structure composed of polypyrrole and solid polymer electrolyte has been fabricated successfully.

AB - Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed varying polymerization conditions and operating conditions. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm2 for 120 minutes. For the application of conductive polymer actuator to micropump, silicon bulk micromachining process has been combined with polymer processes. By use of parylene diaphragm and anisotropic etching of silicon, the micropump structure composed of polypyrrole and solid polymer electrolyte has been fabricated successfully.

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U2 - 10.1117/12.387787

DO - 10.1117/12.387787

M3 - Conference article

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SN - 0277-786X

VL - 3987

SP - 291

EP - 299

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Smart Structures and Materials 2000 - Electroactive Polymer Actuators and Devices (EAPAD)

Y2 - 6 March 2000 through 8 March 2000

ER -

Fabrication of electro-active polymer actuator composed of polypyrrole and solid-polymer electrolyte and its application to micropump

Abstract

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