Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer

Chang Seung Woo; Chae Hyun Lim; Chi Won Cho; Bonghyun Park; Heongkyu Ju; Dong Hun Min; Cheol Jin Lee; Seung Beck Lee

doi:10.1016/j.mee.2007.01.162

Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer

Chang Seung Woo
, Chae Hyun Lim
, Chi Won Cho
, Bonghyun Park
, Heongkyu Ju
, Dong Hun Min
, Cheol Jin Lee
, Seung Beck Lee^*

^*Corresponding author for this work

School of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

57 Citations (Scopus)

Abstract

We report on the fabrication of density controlled single-wall carbon nanotube (SWCNT) thin-films on poly(dimethyl siloxane) (PDMS) substrates by vacuum filtration and PDMS direct molding. The vacuum filtration method made it possible to form a thin-film of SWCNTs having uniform density over a large area. The optical transmittance of the SWCNT thin-films showed inverse proportionality to SWCNT density and conductivity indicating that the SWCNT's PDMS surface coverage was directly related to the thin-film's optical and electrical characteristics. The flexible SWCNT thin-film showed high mechanical stability with negligible change in conductance after being bent by 180°. It was shown that SWCNT thin-film conductance had high sensitivity to NH₃ gas partial pressure and that the lower the density of SWCNTs the higher the sensitivity. The results show that the flexible SWCNT thin-films may be applicable to future high sensitivity mobile sensors.

Original language	English
Pages (from-to)	1610-1613
Number of pages	4
Journal	Microelectronic Engineering
Volume	84
Issue number	5-8
DOIs	https://doi.org/10.1016/j.mee.2007.01.162
Publication status	Published - 2007 May

Bibliographical note

Funding Information:
This work was supported by the National R&D Project for Nano Science and Technology sponsored by the Ministry of Commerce, Industry and Energy, and partly by the BK21 program and the Cavendish-KAIST Joint Research Program sponsored by the Ministry of Science and Technology.

Keywords

Carbon nanotubes
Flexible thin-film
Gas sensor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/j.mee.2007.01.162

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title = "Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer",

abstract = "We report on the fabrication of density controlled single-wall carbon nanotube (SWCNT) thin-films on poly(dimethyl siloxane) (PDMS) substrates by vacuum filtration and PDMS direct molding. The vacuum filtration method made it possible to form a thin-film of SWCNTs having uniform density over a large area. The optical transmittance of the SWCNT thin-films showed inverse proportionality to SWCNT density and conductivity indicating that the SWCNT's PDMS surface coverage was directly related to the thin-film's optical and electrical characteristics. The flexible SWCNT thin-film showed high mechanical stability with negligible change in conductance after being bent by 180°. It was shown that SWCNT thin-film conductance had high sensitivity to NH3 gas partial pressure and that the lower the density of SWCNTs the higher the sensitivity. The results show that the flexible SWCNT thin-films may be applicable to future high sensitivity mobile sensors.",

keywords = "Carbon nanotubes, Flexible thin-film, Gas sensor",

author = "Woo, \{Chang Seung\} and Lim, \{Chae Hyun\} and Cho, \{Chi Won\} and Bonghyun Park and Heongkyu Ju and Min, \{Dong Hun\} and Lee, \{Cheol Jin\} and Lee, \{Seung Beck\}",

note = "Funding Information: This work was supported by the National R\&D Project for Nano Science and Technology sponsored by the Ministry of Commerce, Industry and Energy, and partly by the BK21 program and the Cavendish-KAIST Joint Research Program sponsored by the Ministry of Science and Technology.",

year = "2007",

month = may,

doi = "10.1016/j.mee.2007.01.162",

language = "English",

volume = "84",

pages = "1610--1613",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

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T1 - Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer

AU - Woo, Chang Seung

AU - Lim, Chae Hyun

AU - Cho, Chi Won

AU - Park, Bonghyun

AU - Ju, Heongkyu

AU - Min, Dong Hun

AU - Lee, Cheol Jin

AU - Lee, Seung Beck

N1 - Funding Information: This work was supported by the National R&D Project for Nano Science and Technology sponsored by the Ministry of Commerce, Industry and Energy, and partly by the BK21 program and the Cavendish-KAIST Joint Research Program sponsored by the Ministry of Science and Technology.

PY - 2007/5

Y1 - 2007/5

N2 - We report on the fabrication of density controlled single-wall carbon nanotube (SWCNT) thin-films on poly(dimethyl siloxane) (PDMS) substrates by vacuum filtration and PDMS direct molding. The vacuum filtration method made it possible to form a thin-film of SWCNTs having uniform density over a large area. The optical transmittance of the SWCNT thin-films showed inverse proportionality to SWCNT density and conductivity indicating that the SWCNT's PDMS surface coverage was directly related to the thin-film's optical and electrical characteristics. The flexible SWCNT thin-film showed high mechanical stability with negligible change in conductance after being bent by 180°. It was shown that SWCNT thin-film conductance had high sensitivity to NH3 gas partial pressure and that the lower the density of SWCNTs the higher the sensitivity. The results show that the flexible SWCNT thin-films may be applicable to future high sensitivity mobile sensors.

AB - We report on the fabrication of density controlled single-wall carbon nanotube (SWCNT) thin-films on poly(dimethyl siloxane) (PDMS) substrates by vacuum filtration and PDMS direct molding. The vacuum filtration method made it possible to form a thin-film of SWCNTs having uniform density over a large area. The optical transmittance of the SWCNT thin-films showed inverse proportionality to SWCNT density and conductivity indicating that the SWCNT's PDMS surface coverage was directly related to the thin-film's optical and electrical characteristics. The flexible SWCNT thin-film showed high mechanical stability with negligible change in conductance after being bent by 180°. It was shown that SWCNT thin-film conductance had high sensitivity to NH3 gas partial pressure and that the lower the density of SWCNTs the higher the sensitivity. The results show that the flexible SWCNT thin-films may be applicable to future high sensitivity mobile sensors.

KW - Carbon nanotubes

KW - Flexible thin-film

KW - Gas sensor

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DO - 10.1016/j.mee.2007.01.162

M3 - Article

AN - SCOPUS:34247866409

SN - 0167-9317

VL - 84

SP - 1610

EP - 1613

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-8

ER -

Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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