Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film

Ju Hyeon Shin, Seong Hwan Lee, Kyeong Jae Byeon, Kang Soo Han, Heon Lee, Kentaro Tsunozaki

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)


UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nanosized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusions, having a low surface energy and good flexibility. Therefore, the development of low-cost, transparent, and flexible templates is essential. In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold. Micro- and nano-sized surface protrusion patterns were formed on the fluorinated polymer layer by the hot embossing process from a Si master template. Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process. In this way, the micro- to nano-sized patterns of the original master Si template were replicated on various substrates, including a flat Si substrate and curved acryl substrate, with high fidelity using UV nanoimprint lithography.

Original languageEnglish
Article number458
Pages (from-to)1-5
Number of pages5
JournalNanoscale Research Letters
Publication statusPublished - 2011

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics


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