TY - JOUR
T1 - Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film
AU - Shin, Ju Hyeon
AU - Lee, Seong Hwan
AU - Byeon, Kyeong Jae
AU - Han, Kang Soo
AU - Lee, Heon
AU - Tsunozaki, Kentaro
N1 - Funding Information:
1This work was supported by the Nano Research and Development program through the Korea Science and Engineering Foundation funded by the Ministry of Education, Science and Technology (2010-0019152) and Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (NRF-2011-0004819).
PY - 2011
Y1 - 2011
N2 - UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nanosized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusions, having a low surface energy and good flexibility. Therefore, the development of low-cost, transparent, and flexible templates is essential. In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold. Micro- and nano-sized surface protrusion patterns were formed on the fluorinated polymer layer by the hot embossing process from a Si master template. Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process. In this way, the micro- to nano-sized patterns of the original master Si template were replicated on various substrates, including a flat Si substrate and curved acryl substrate, with high fidelity using UV nanoimprint lithography.
AB - UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nanosized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusions, having a low surface energy and good flexibility. Therefore, the development of low-cost, transparent, and flexible templates is essential. In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold. Micro- and nano-sized surface protrusion patterns were formed on the fluorinated polymer layer by the hot embossing process from a Si master template. Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process. In this way, the micro- to nano-sized patterns of the original master Si template were replicated on various substrates, including a flat Si substrate and curved acryl substrate, with high fidelity using UV nanoimprint lithography.
UR - http://www.scopus.com/inward/record.url?scp=84860377631&partnerID=8YFLogxK
U2 - 10.1186/1556-276X-6-458
DO - 10.1186/1556-276X-6-458
M3 - Article
C2 - 21767390
AN - SCOPUS:84860377631
SN - 1931-7573
VL - 6
SP - 1
EP - 5
JO - Nanoscale Research Letters
JF - Nanoscale Research Letters
M1 - 458
ER -