Fabrication of Ge2Sb2Te5 based PRAM device at 60 nm scale by using UV nanoimprint lithography

Heon Lee, Sung Hoon Hong, Ki Yeon Yang, Gun Young Jung

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)


Phase change memory is one of the most promising non-volatile memory for the next generation memory media due to its simplicity, wide dynamic range, fast switching speed and possibly low power consumption. Low power consuming operation of phase change random access memory (PRAM) can be achieved by confining the switching volume of phase change media into nanometer scale. Nanoimprint lithography is an emerging lithographic technique in which surface protrusions of a mold such as sub-100 nm patterns are transferred into a resin layer easily. In this study, crossbar structures of phase change device array based on Ge2Sb2Te5 were successfully fabricated at 60 nm scale by two consecutive UV nanoimprint lithography and metal lift-off process, which showed on/off resistance ratio up to 3000.

Original languageEnglish
Pages (from-to)573-576
Number of pages4
JournalMicroelectronic Engineering
Issue number4
Publication statusPublished - 2007 Apr

Bibliographical note

Funding Information:
This study was supported by Consortium of Semiconductor Advanced Research Program and by a Grant from Center for Nano-scale Mechatronics and Manufacturing, one of the 21st Century Frontier Research Programs, which were supported by the Ministry of Science and Technology, Korea.


  • Chalcogenide
  • Lift-off
  • Nanoimprint lithography
  • Phase change memory
  • Phase transition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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