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Fabrication of high density nano-pillar type phase change memory devices using flexible AAO shaped template
Sung Hoon Hong
, Byeong Ju Bae
,
Heon Lee
*
, Jun Ho Jeong
*
Corresponding author for this work
Research output
:
Contribution to journal
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Article
›
peer-review
19
Citations (Scopus)
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Keyphrases
Phase Change Random Access Memory (PCRAM)
100%
High Density
100%
Nanopillars
100%
Anodic Alumina Oxide
100%
Ultraviolet Nanoimprint Lithography (UV-NIL)
40%
Electrical Properties
20%
Ge2Sb2Te5
20%
Nanopatterning
20%
Measurement System
20%
Hot Embossing
20%
Nanohole Array
20%
Electrical Measurements
20%
Conductive Atomic Force Microscopy (C-AFM)
20%
Polymer Template
20%
Nanoimprint Technology
20%
Flexible Polyimide Substrates
20%
PVC Polymer
20%
Flexible PVC
20%
Material Science
Oxide Compound
100%
Density
100%
Aluminum Oxide
100%
Phase-Change Memory
100%
Polyimide
20%
Polyvinyl Chloride
20%