Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography

Yinlan Ruan, Myung Ki Kim, Yong He Lee, Barry Luther-Davies, Andrei Rode

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40 Citations (Scopus)


The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.

Original languageEnglish
Article number071102
JournalApplied Physics Letters
Issue number7
Publication statusPublished - 2007
Externally publishedYes

Bibliographical note

Funding Information:
The authors thank the Endeavor Australian Cheungkong award for financial support and the support of the Australian Research Council through its Federation Fellow and Centers of Excellence Programs. The key assistance of the laboratory members, especially Se-Heon Kim, Min-Kyo Seo, and Sun-Kyung Kim, from Nanolaser Laboratory, KAIST, is greatly appreciated. The authors thank Christian Grillet and Cameron Smith from the University of Sydney for data on one of the resonators.

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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