Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography

Yinlan Ruan; Myung Ki Kim; Yong He Lee; Barry Luther-Davies; Andrei Rode

doi:10.1063/1.2476416

Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography

Yinlan Ruan, Myung Ki Kim, Yong He Lee, Barry Luther-Davies, Andrei Rode

Research output: Contribution to journal › Article › peer-review

40 Citations (Scopus)

Abstract

The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.

Original language	English
Article number	071102
Journal	Applied Physics Letters
Volume	90
Issue number	7
DOIs	https://doi.org/10.1063/1.2476416
Publication status	Published - 2007
Externally published	Yes

Bibliographical note

Funding Information:
The authors thank the Endeavor Australian Cheungkong award for financial support and the support of the Australian Research Council through its Federation Fellow and Centers of Excellence Programs. The key assistance of the laboratory members, especially Se-Heon Kim, Min-Kyo Seo, and Sun-Kyung Kim, from Nanolaser Laboratory, KAIST, is greatly appreciated. The authors thank Christian Grillet and Cameron Smith from the University of Sydney for data on one of the resonators.

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2476416

Cite this

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title = "Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography",

abstract = "The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.",

author = "Yinlan Ruan and Kim, {Myung Ki} and Lee, {Yong He} and Barry Luther-Davies and Andrei Rode",

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AU - Luther-Davies, Barry

AU - Rode, Andrei

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N2 - The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.

AB - The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.

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Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography

Abstract

Bibliographical note

ASJC Scopus subject areas

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