Abstract
Carbon nanotubes (CNTs), which are used as a mask for the Ar+ ion etching in the fabrication of metal nanowires, is demonstrated. Au/Ti nanowires of a few nanometers in width are obtained by a simple procedure of CNT deposition on a metal layer followed by Ar+ ion milling. The CNTs acted as a good mask against Ar+ ion bombardment, and the Au/Ti nanowires duplicated the lateral shape of the CNTs. The remaining CNTs after the ion milling are removed from the resulting nanowires by atomic force microscopy (AFM) manipulation.
Original language | English |
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Pages (from-to) | 1329-1332 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 18 |
Issue number | 4 I |
DOIs | |
Publication status | Published - 2000 Jul |
Externally published | Yes |
Event | 46th National Symposium of the American Vacuum Society - Seatlle, WA, USA Duration: 1999 Oct 25 → 1999 Oct 29 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films