Fabrication of metal nanowire using carbon nanotube as a mask

Wan Soo Yun; Jinhee Kim; Kang Ho Park; Jeong Sook Ha; Young Jo Ko; Kyoungwan Park; Seong Keun Kim; Yong Joo Doh; Hu Jong Lee; Jean Paul Salvetat; László Forró

doi:10.1116/1.582349

Fabrication of metal nanowire using carbon nanotube as a mask

Wan Soo Yun, Jinhee Kim, Kang Ho Park, Jeong Sook Ha, Young Jo Ko, Kyoungwan Park, Seong Keun Kim, Yong Joo Doh, Hu Jong Lee, Jean Paul Salvetat, László Forró

Research output: Contribution to journal › Conference article › peer-review

73 Citations (Scopus)

Abstract

Carbon nanotubes (CNTs), which are used as a mask for the Ar⁺ ion etching in the fabrication of metal nanowires, is demonstrated. Au/Ti nanowires of a few nanometers in width are obtained by a simple procedure of CNT deposition on a metal layer followed by Ar⁺ ion milling. The CNTs acted as a good mask against Ar⁺ ion bombardment, and the Au/Ti nanowires duplicated the lateral shape of the CNTs. The remaining CNTs after the ion milling are removed from the resulting nanowires by atomic force microscopy (AFM) manipulation.

Original language	English
Pages (from-to)	1329-1332
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	18
Issue number	4 I
DOIs	https://doi.org/10.1116/1.582349
Publication status	Published - 2000 Jul
Externally published	Yes
Event	46th National Symposium of the American Vacuum Society - Seatlle, WA, USA Duration: 1999 Oct 25 → 1999 Oct 29

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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title = "Fabrication of metal nanowire using carbon nanotube as a mask",

abstract = "Carbon nanotubes (CNTs), which are used as a mask for the Ar+ ion etching in the fabrication of metal nanowires, is demonstrated. Au/Ti nanowires of a few nanometers in width are obtained by a simple procedure of CNT deposition on a metal layer followed by Ar+ ion milling. The CNTs acted as a good mask against Ar+ ion bombardment, and the Au/Ti nanowires duplicated the lateral shape of the CNTs. The remaining CNTs after the ion milling are removed from the resulting nanowires by atomic force microscopy (AFM) manipulation.",

author = "Yun, {Wan Soo} and Jinhee Kim and Park, {Kang Ho} and Ha, {Jeong Sook} and Ko, {Young Jo} and Kyoungwan Park and Kim, {Seong Keun} and Doh, {Yong Joo} and Lee, {Hu Jong} and Salvetat, {Jean Paul} and L{\'a}szl{\'o} Forr{\'o}",

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language = "English",

volume = "18",

pages = "1329--1332",

journal = "Journal of Vacuum Science and Technology A",

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number = "4 I",

note = "46th National Symposium of the American Vacuum Society ; Conference date: 25-10-1999 Through 29-10-1999",

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TY - JOUR

T1 - Fabrication of metal nanowire using carbon nanotube as a mask

AU - Yun, Wan Soo

AU - Kim, Jinhee

AU - Park, Kang Ho

AU - Ha, Jeong Sook

AU - Ko, Young Jo

AU - Park, Kyoungwan

AU - Kim, Seong Keun

AU - Doh, Yong Joo

AU - Lee, Hu Jong

AU - Salvetat, Jean Paul

AU - Forró, László

PY - 2000/7

Y1 - 2000/7

N2 - Carbon nanotubes (CNTs), which are used as a mask for the Ar+ ion etching in the fabrication of metal nanowires, is demonstrated. Au/Ti nanowires of a few nanometers in width are obtained by a simple procedure of CNT deposition on a metal layer followed by Ar+ ion milling. The CNTs acted as a good mask against Ar+ ion bombardment, and the Au/Ti nanowires duplicated the lateral shape of the CNTs. The remaining CNTs after the ion milling are removed from the resulting nanowires by atomic force microscopy (AFM) manipulation.

AB - Carbon nanotubes (CNTs), which are used as a mask for the Ar+ ion etching in the fabrication of metal nanowires, is demonstrated. Au/Ti nanowires of a few nanometers in width are obtained by a simple procedure of CNT deposition on a metal layer followed by Ar+ ion milling. The CNTs acted as a good mask against Ar+ ion bombardment, and the Au/Ti nanowires duplicated the lateral shape of the CNTs. The remaining CNTs after the ion milling are removed from the resulting nanowires by atomic force microscopy (AFM) manipulation.

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U2 - 10.1116/1.582349

DO - 10.1116/1.582349

M3 - Conference article

AN - SCOPUS:0000670356

SN - 0734-2101

VL - 18

SP - 1329

EP - 1332

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

IS - 4 I

T2 - 46th National Symposium of the American Vacuum Society

Y2 - 25 October 1999 through 29 October 1999

ER -

Fabrication of metal nanowire using carbon nanotube as a mask

Abstract

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