Fabrication of metal-semiconductor-metal (MSM) UV photodetectors with Al0.16Ga0.84N/GaN heterqstructures

Dong Wook Kim, Kyong Seok Chea, Yong Jo Park, In Hwan Lee, Cheul Ro Lee

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


Metal-semiconductor-metal (MSM) ultraviolet photodetectors were successfully fabricated and characterized. Al0.16Ga 0.84N/GaN heterostructures with HT-AlN interlayer whose thicknesses ranged from 30 to 70 nm were grown on sapphire (0001) to achieve high performance MSM UV photodetectors by MOCVD. The HT-AlN interlayer with a thickness of 30 nm showed the best results in terms of quality, so we fabricated and characterized MSM UV photodetectors with an interdigitated finger pattern using the Al0.16Ga0.84N/GaN heterostructure incorporating this layer. Their responsivity was 0.2 A/W under -10 V bias at a sharp cut-off of 330 nm. A fast response time of 15.4 ns was achieved, and the dark current of 3.1 p A/cm2 under zero bias shows that low leakage current was achieved.

Original languageEnglish
Pages (from-to)2686-2690
Number of pages5
JournalPhysica Status Solidi (A) Applied Research
Issue number12
Publication statusPublished - 2004 Sept
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


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