Fabrication of monolithic polymer nanofluidic channels using nanowires as sacrificial templates

Kyo Seon Chu, Seungwook Kim, Haegeun Chung, Joon Ho Oh, Tae Yeon Seong, Boo Hyun An, Young Keun Kim, Jae Hyoung Park, Young Rag Do, Woong Kim

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


We report a facile and reliable method to fabricate polymer-based monolithic nanofluidic channels. The nanochannels are obtained via three main steps: (1) fabrication of nanowire-transistor like structures, which are silver or zinc oxide nanowires horizontally bridging two electrodes made of zinc oxide on SiO2/Si substrates; (2) casting and curing polyimide solution on the nanowire structures; and (3) selective etching of the nanowire and electrode templates against the polyimide substrates. This process leads to the production of nanochannels with a diameter down to ∼50 nm. Our method is based on nanowires that are chemically synthesized whereas nanopattern fabrication conventionally relies on expensive equipment. Moreover, the polymer nanochannels are fabricated monolithically while a process of bonding two different materials is required in traditional methods where leakage problems are often identified at the interface. Construction of nanofluidic circuitry could be expected in the future based on the current work.

Original languageEnglish
Article number425302
Issue number42
Publication statusPublished - 2010 Oct 22

ASJC Scopus subject areas

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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