Fabrication of moth-eye structure on glass by ultraviolet imprinting process with polymer template

Byeong Ju Bae, Sung Hoon Hong, Eun Ju Hong, Heon Lee, Gun Young Jung

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48 Citations (Scopus)


An antireflection moth-eye structure was fabricated on a glass substrate by ultraviolet nanoimprint lithography (UV-NIL). A Ni template with an artificial conical structure was fabricated by laser interference lithography an used as a stamp for embossing. A transparent PVC template was fabricated by hot embossing. The embossed poly(vinyl chloride) (PVC) film was then used as an imprint template after depositing SiO2 and a self-assembled monolayer (SAM). Using the embossed PVC film as a UV-NIL stamp, a polymer based moth-eye structure was formed on the glass template and its transmittance, parallel to surface normal, was increased to 93% for a single side patterned and 97% for a double side patterned. However, at wavelengths shorter than 430 nm, the transmittance of 30°-rotated glass substrate with a moth-eye structure became lower than that of the bare glass substrate, while the transmittance was not changed for longer wavelength regions.

Original languageEnglish
Article number010207
JournalJapanese journal of applied physics
Issue number1
Publication statusPublished - 2009 Jan 20

ASJC Scopus subject areas

  • General Engineering
  • General Physics and Astronomy


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