Fabrication of multilayer passive and active electric components on polymer using inkjet printing and low temperature laser processing

Seung Hwan Ko, Jaewon Chung, Heng Pan, Costas P. Grigoropoulos, Dimos Poulikakos

Research output: Contribution to journalArticlepeer-review

164 Citations (Scopus)


The low temperature fabrication of passive (conductor, capacitor) and active (field effect transistor) electrical components on flexible polymer substrate is presented in this paper. A drop-on-demand (DOD) ink-jetting system was used to print gold nano-particles suspended in Alpha-Terpineol solvent, PVP (poly-4-vinylphenol) in PGMEA (propylene glycol monomethyl ether acetate) solvent, semiconductor polymer (modified polythiophene) in chloroform solution to fabricate passive and active electrical components on flexible polymer substrates. Short pulsed laser ablation enabled finer electrical components to overcome the resolution limitation of inkjet deposition. Continuous argon ion laser was irradiated locally to evaporate the carrier solvent as well as sinter gold nano-particles. In addition, selective ablation of multilayered gold nanoparticle film was demonstrated using the novel SPLA-DAT (selective pulsed laser ablation by different ablation threshold) scheme for sintered and non-sintered gold nanoparticles. Finally, selective ablation of multilayered film was used to define narrow FET (field effect transistor) channel. Semiconductor polymer solution was deposited on top of channel to complete OFET (organic field effect transistor) fabrication.

Original languageEnglish
Pages (from-to)161-168
Number of pages8
JournalSensors and Actuators, A: Physical
Issue number1
Publication statusPublished - 2007 Feb 28

Bibliographical note

Funding Information:
The authors wish to thank Professor Vivek Subramanian of the Department of Electrical Engineering, Computer Sciences, and Professor J.M.J Fréchet and Dr. C. Luscombe of School of Chemistry, University of California, Berkeley for valuable discussions and material supply. Financial support to the University of California, Berkeley by the U.S. National Science Foundation under Grant CTS-0417563, to the Swiss Federal Institute of Technology in Zurich by the Swiss National Science Foundation under grant No. 2000-063580.00 and to Korea University by Basic Research Program of the Korea Science & Engineering Foundation under grant No. R01-2005-000-11036-0 is gratefully acknowledged.


  • Flexible electronics
  • Inkjet direct writing
  • NALSA (nanomaterial assisted laser sintering and ablation)
  • Nanoparticles laser ablation and sintering
  • OFET (organic field effect transistor)
  • SPLA-DAT (selective pulsed laser ablation by different ablation threshold)
  • Semiconductor polymer

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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