Fabrication of nano-porous structure on silicon substrate using nanoimprint lithography with an anodic aluminum oxide nano-template

Sung Hoon Hong, Kang Soo Han, Heon Lee, Ji Ung Cho, Young Keun Kim

    Research output: Contribution to journal › Article › peer-review

    13 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Fabrication of nano-porous structure on silicon substrate using nanoimprint lithography with an anodic aluminum oxide nano-template'. Together they form a unique fingerprint.

    Keyphrases

    Material Science