Fabrication of nano-sized metal patterns on flexible polyethylene-terephthalate substrate using bi-layer nanoimprint lithography

Seon Yong Hwang; Ho Yong Jung; Jun Ho Jeong; Heon Lee

doi:10.1016/j.tsf.2009.01.164

Fabrication of nano-sized metal patterns on flexible polyethylene-terephthalate substrate using bi-layer nanoimprint lithography

Seon Yong Hwang, Ho Yong Jung, Jun Ho Jeong, Heon Lee

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

Polymer films are widely used as a substrate for displays and for solar cells since they are cheap, transparent and flexible, and their material properties are easy to design. Polyethylene-terephthalate (PET) is especially useful for various applications requiring transparency, flexibility and good thermal and chemical resistance. In this study, nano-sized metal patterns were fabricated on flexible PET film by using nanoimprint lithography (NIL). Water-soluble poly-vinyl alcohol (PVA) resin was used as a planarization and sacrificial layer for the lift-off process, as it does not damage the PET films and can easily be etched off by using oxygen plasma. NIL was used to fabricate the nano-sized patterns on the non-planar or flexible substrate. Finally, a nano-sized metal pattern was successfully formed by depositing the metal layer over the imprinted resist patterns and applying the lift-off process, which is economic and environmentally friendly, to the PET films.

Original language	English
Pages (from-to)	4104-4107
Number of pages	4
Journal	Thin Solid Films
Volume	517
Issue number	14
DOIs	https://doi.org/10.1016/j.tsf.2009.01.164
Publication status	Published - 2009 May 29

Bibliographical note

Funding Information:
This work was supported by Industry and Energy and the Ministry of Knowledge Economy (MKE) and the Korea Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for Strategic Technology, and this work was financially supported by the Government and the Korea Sanhak Foundation.

Copyright:
Copyright 2009 Elsevier B.V., All rights reserved.

Keywords

Bi-layer imprint
Flexible substrate
Metal nano-pattern
PET (polyethylene-terephthalate)
PVA (poly-vinyl alcohol)

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2009.01.164

Cite this

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title = "Fabrication of nano-sized metal patterns on flexible polyethylene-terephthalate substrate using bi-layer nanoimprint lithography",

abstract = "Polymer films are widely used as a substrate for displays and for solar cells since they are cheap, transparent and flexible, and their material properties are easy to design. Polyethylene-terephthalate (PET) is especially useful for various applications requiring transparency, flexibility and good thermal and chemical resistance. In this study, nano-sized metal patterns were fabricated on flexible PET film by using nanoimprint lithography (NIL). Water-soluble poly-vinyl alcohol (PVA) resin was used as a planarization and sacrificial layer for the lift-off process, as it does not damage the PET films and can easily be etched off by using oxygen plasma. NIL was used to fabricate the nano-sized patterns on the non-planar or flexible substrate. Finally, a nano-sized metal pattern was successfully formed by depositing the metal layer over the imprinted resist patterns and applying the lift-off process, which is economic and environmentally friendly, to the PET films.",

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note = "Funding Information: This work was supported by Industry and Energy and the Ministry of Knowledge Economy (MKE) and the Korea Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for Strategic Technology, and this work was financially supported by the Government and the Korea Sanhak Foundation. Copyright: Copyright 2009 Elsevier B.V., All rights reserved.",

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AU - Lee, Heon

N1 - Funding Information: This work was supported by Industry and Energy and the Ministry of Knowledge Economy (MKE) and the Korea Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for Strategic Technology, and this work was financially supported by the Government and the Korea Sanhak Foundation. Copyright: Copyright 2009 Elsevier B.V., All rights reserved.

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N2 - Polymer films are widely used as a substrate for displays and for solar cells since they are cheap, transparent and flexible, and their material properties are easy to design. Polyethylene-terephthalate (PET) is especially useful for various applications requiring transparency, flexibility and good thermal and chemical resistance. In this study, nano-sized metal patterns were fabricated on flexible PET film by using nanoimprint lithography (NIL). Water-soluble poly-vinyl alcohol (PVA) resin was used as a planarization and sacrificial layer for the lift-off process, as it does not damage the PET films and can easily be etched off by using oxygen plasma. NIL was used to fabricate the nano-sized patterns on the non-planar or flexible substrate. Finally, a nano-sized metal pattern was successfully formed by depositing the metal layer over the imprinted resist patterns and applying the lift-off process, which is economic and environmentally friendly, to the PET films.

AB - Polymer films are widely used as a substrate for displays and for solar cells since they are cheap, transparent and flexible, and their material properties are easy to design. Polyethylene-terephthalate (PET) is especially useful for various applications requiring transparency, flexibility and good thermal and chemical resistance. In this study, nano-sized metal patterns were fabricated on flexible PET film by using nanoimprint lithography (NIL). Water-soluble poly-vinyl alcohol (PVA) resin was used as a planarization and sacrificial layer for the lift-off process, as it does not damage the PET films and can easily be etched off by using oxygen plasma. NIL was used to fabricate the nano-sized patterns on the non-planar or flexible substrate. Finally, a nano-sized metal pattern was successfully formed by depositing the metal layer over the imprinted resist patterns and applying the lift-off process, which is economic and environmentally friendly, to the PET films.

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KW - PVA (poly-vinyl alcohol)

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Fabrication of nano-sized metal patterns on flexible polyethylene-terephthalate substrate using bi-layer nanoimprint lithography

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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