Fabrication of nano-structures on glass substrate by modified nano-imprint patterning with a plasma-induced surface-oxidized Cr mask

So Hee Lee, Su Yeon Lee, Seong Eui Lee, Heon Lee, Hee Chul Lee

    Research output: Contribution to journal › Article › peer-review

    3 Citations (Scopus)

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    Keyphrases

    Engineering

    Material Science