In this study, a hydrogen silsesquioxane (HSQ) and zirconium oxide (ZrO2, zirconia) nanoparticle composite was used for a nanopatterned roll stamp fabricated using the direct printing technique. HSQ, referred as a spin on glass (SOG) material have been used for direct printing process with polydimethylsiloxane mold. In order to enhance mechanical properties of SOG material without losing printable property, ZrO2 nanoparticles were dispersed with HSQ solution. After direct printing process of composite material, annealing process was done to convert polymeric HSQ structure into SiO2 in order to enhance mechanical properties. We evaluate the chemical, optical and mechanical properties of the HSQ/ZrO2 composite by FT-IR, a refractive index measurement, a nanoindentation test and a pencil adhesion test. At the mechanical property tests, the composite material shows a high hardness value and good adhesion properties with glass substrate. Considering the composite material properties, it is suitable for use as a master cylindrical stamp in a roll-to-roll process.
Bibliographical noteFunding Information:
This research was supported by the R&D program for Industrial Core Technology through the Korea Evaluation Institute of Industrial Technology supported by the Ministry of Knowledge Economy in Korea (Grant No. 10040225) and the Pioneer Research Center Program through the National Research Foundation of Korea funded by the Ministry of Science, ICT & Future Planning (NRF-2013M3C1A3063597).
© 2014, Springer Science+Business Media New York.
- Direct printing
- Hydrogen silsesquioxane
- Roll to roll process
- Zirconia nanoparticle
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- General Chemistry
- Condensed Matter Physics
- Materials Chemistry