Fabrication of scanning thermal microscope probe with ultra-thin oxide tip and demonstration of its enhanced performance

Heebum Chae, Gwangseok Hwang, Ohmyong Kwon

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


With the vigorous development of new nanodevices and nanomaterials, improvements in the quantitation and resolution of the measurement of nanoscale energy transport/conversion phenomena have become increasingly important. Although several new advanced methods for scanning thermal microscopy (SThM) have been developed to meet these needs, such methods require a drastic enhancement of SThM probe performance. In this study, by taking advantage of the characteristics of micromechanical structures where their mechanical stability is maintained even when the film that composes the structures becomes extremely thin, we develop a new design of SThM probe whose tip is made of ultra-thin SiO2 film (~100 nm), fabricate the SThM probes, and demonstrate experimentally that the tip radius, thermal time constant, and thermal sensitivity of the probe are all improved. We expect the development of new high-performance SThM probes, along with the advanced measurement methods, to allow the measurement of temperature and thermal properties with higher spatial resolution and quantitative accuracy, ultimately making essential contributions to diverse areas of science and engineering related to the nanoscale energy transport/conversion phenomena.

Original languageEnglish
Pages (from-to)195-203
Number of pages9
Publication statusPublished - 2016 Dec 1

Bibliographical note

Funding Information:
This work was supported by the Basic Science Research Program ( NRF-2013R1A1A2012138 ) and Nano-material Technology Development Program (Green Nano Technology Development Program) (No. 2011-0030146 ) through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology.

Publisher Copyright:
© 2016 Elsevier B.V.


  • Null point scanning thermal microscope
  • Quantitative measurement
  • Scanning thermal microscope
  • Thermal sensitivity
  • Thermal time constant
  • Ultra-thin oxide tip

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation


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