Fabrication of silica nanostructures with a microwave assisted direct patterning process

Ju Hyeon Shin, Bit Na Go, Je Hong Choi, Jin Seoung Kim, Gun Young Jung, Heetae Kim, Heon Lee

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

Silica nanostructures were fabricated on glass substrate using a microwave assisted direct patterning (MADP) process, which is a variety of soft lithography. During the MADP process using polydimethylsiloxane (PDMS), mold and microwave heating are performed simultaneously. Blanket thin film and micro-to nano-sized structures, including moth-eye patterns of SiO which consisted of coalesced silica nanoparticles, were formed on glass substrates from SiO2 nano-particle dispersed solutions with varied microwave heating time. Optical properties and surface morphologies of micro-sized hemisphere, nano-sized pillar, motheye and 50 nm sized line/space silica patterns were measured using UV-vis and a scanning electron microscope. X-ray diffraction analysis of SiO2 thin films with and without microwave heating was also carried out.

Original languageEnglish
Article number225301
JournalNanotechnology
Volume25
Issue number22
DOIs
Publication statusPublished - 2014

Bibliographical note

Funding Information:
This research was supported by NanoMaterial Technology Development Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (2012M3A7B4035323). This research was also conducted by International Collaborative Research and Development Program and funded by Ministry of Trade, Industry & Energy.

Funding Information:
This research was supported by Nano·Material Technology Development Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (2012M3A7B4035323). This research was also conducted by International Collaborative Research and Development Program and funded by Ministry of Trade, Industry & Energy.

Publisher Copyright:
© 2014 IOP Publishing Ltd Printed in the UK.

Keywords

  • Microwave assisted direct patterning
  • Microwave heating
  • Moth-eye pattern
  • PDMS mold
  • SiO nano-particle dispersed solution
  • Soft lithography

ASJC Scopus subject areas

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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