Abstract
Silica nanostructures were fabricated on glass substrate using a microwave assisted direct patterning (MADP) process, which is a variety of soft lithography. During the MADP process using polydimethylsiloxane (PDMS), mold and microwave heating are performed simultaneously. Blanket thin film and micro-to nano-sized structures, including moth-eye patterns of SiO which consisted of coalesced silica nanoparticles, were formed on glass substrates from SiO2 nano-particle dispersed solutions with varied microwave heating time. Optical properties and surface morphologies of micro-sized hemisphere, nano-sized pillar, motheye and 50 nm sized line/space silica patterns were measured using UV-vis and a scanning electron microscope. X-ray diffraction analysis of SiO2 thin films with and without microwave heating was also carried out.
Original language | English |
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Article number | 225301 |
Journal | Nanotechnology |
Volume | 25 |
Issue number | 22 |
DOIs | |
Publication status | Published - 2014 |
Keywords
- Microwave assisted direct patterning
- Microwave heating
- Moth-eye pattern
- PDMS mold
- SiO nano-particle dispersed solution
- Soft lithography
ASJC Scopus subject areas
- Bioengineering
- Chemistry(all)
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering