Fabrication of silicon nanodots on insulator using block copolymer thin film

Engineering & Materials Science

• Nanodots 100%
• Block copolymers 75%
• Polystyrenes 62%
• Thin films 51%
• Silicon 42%
• Fabrication 40%
• Polymethyl methacrylates 36%
• Silicon oxides 19%
• Fluorine 18%
• Reactive ion etching 18%
• Acetic acid 17%
• Polysilicon 15%
• Etching 14%
• Evaporators 14%
• Silica 14%
• Substrates 9%

Physics & Astronomy

• block copolymers 64%
• polystyrene 48%
• insulators 40%
• templates 38%
• fabrication 33%
• silicon 29%
• polymethyl methacrylate 28%
• thin films 28%
• etching 20%
• acetic acid 18%
• evaporators 17%
• assembling 15%
• silicon oxides 14%
• fluorine 13%
• silicon dioxide 10%
• cavities 8%
• matrices 7%
• ions 6%

Chemical Compounds

• Nonconductor 61%
• Block Copolymer 44%
• Etching 24%
• Methacrylate 22%
• Evaporator 18%
• Silicon Oxide 16%
• Silicon Dioxide 16%
• Cylinder 14%
• Acetic Acid 10%
• Ion 5%
• Time 4%