Fabrication of standard calibration samples for highly reliable atomic force microscope measurements

Tae Hoon Park, Ju Hyun Park, Dong Su Jeon, Yong Kyun Kim, Chi Hong Min, Jae Heung Yu, Tae Geun Kim

Research output: Contribution to journalArticlepeer-review


We designed and fabricated a micro-electromechanical system based standard calibration sample to be used for performing atomic force microscopic measurements. The conventional calibration sample of atomic force microscope exhibits disadvantages in terms of its long-term reliability and durability owing to its simple and limited pattern shapes and sizes. In this study, we fabricated a sample with three cross patterns on a 2-inch insulating glass wafer employing conductive materials. The pattern was designed with a broader line width (5 Μm) and a lower height (20 nm) as compared with those of conventional calibration samples. The exact dimensions of the standard calibration sample were examined using surface profile, current mapping, surface potential mapping, and electrostatic mapping images recorded with atomic force microscopy. Highly reliable atomic force microscopic data can be acquired using our proposed standard calibration sample.

Original languageEnglish
Pages (from-to)7783-7787
Number of pages5
JournalJournal of Nanoscience and Nanotechnology
Issue number10
Publication statusPublished - 2017 Oct

Bibliographical note

Funding Information:
This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIP) (No. 2016R1A3B1908249) and by the Technological Innovation R&D Program (C0299379) funded by the Small and Medium Business Administration (SMBA) in Korea. This research was also supported by Korea University Future Research Grant.

Publisher Copyright:
Copyright © 2017 American Scientific Publishers All rights reserved.

Copyright 2017 Elsevier B.V., All rights reserved.


  • MEMS Atomic Force Microscope
  • Standard Calibration Sample

ASJC Scopus subject areas

  • Bioengineering
  • General Chemistry
  • Biomedical Engineering
  • General Materials Science
  • Condensed Matter Physics


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