We designed and fabricated a micro-electromechanical system based standard calibration sample to be used for performing atomic force microscopic measurements. The conventional calibration sample of atomic force microscope exhibits disadvantages in terms of its long-term reliability and durability owing to its simple and limited pattern shapes and sizes. In this study, we fabricated a sample with three cross patterns on a 2-inch insulating glass wafer employing conductive materials. The pattern was designed with a broader line width (5 Μm) and a lower height (20 nm) as compared with those of conventional calibration samples. The exact dimensions of the standard calibration sample were examined using surface profile, current mapping, surface potential mapping, and electrostatic mapping images recorded with atomic force microscopy. Highly reliable atomic force microscopic data can be acquired using our proposed standard calibration sample.
Bibliographical noteFunding Information:
This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIP) (No. 2016R1A3B1908249) and by the Technological Innovation R&D Program (C0299379) funded by the Small and Medium Business Administration (SMBA) in Korea. This research was also supported by Korea University Future Research Grant.
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- MEMS Atomic Force Microscope
- Standard Calibration Sample
ASJC Scopus subject areas
- General Chemistry
- Biomedical Engineering
- General Materials Science
- Condensed Matter Physics