@inproceedings{18663bd65a994c82ae6760bebe055953,
title = "Fabrication of suspended bridge type resonator using laser interference lithography",
abstract = "We report the fabrication method of suspended bridge type nanoelectromechanical system (NEMS) resonator for high quality factor (Q-factor) and increase in resonance frequency beyond the ultra-high frequency (UHF) by laser interference lithography (LIL) using silicon-on-insulator wafer. LIL is capable of a fast nano-patterning over a large area and does not require a mask. In fabricating a suspended bridge type structure, parameter effects such as exposure dosage and the half angle between two incident beams at the intersection were explored. In this paper, successful fabrication of suspended bridge type NEMS resonator is presented using 257nm wavelength laser LIL.",
keywords = "Laser Interference Lithography, NEMS, Resonator",
author = "Boyeon Hwang and Song, {In Sang} and Park, {Jung Ho} and Shin, {Jea Shik} and Rieh, {Jae Sung} and Hwang, {Sung Woo} and Ju, {Byeong Kwon}",
year = "2012",
language = "English",
isbn = "9782874870286",
series = "European Microwave Week 2012: {"}Space for Microwaves{"}, EuMW 2012, Conference Proceedings - 7th European Microwave Integrated Circuits Conference, EuMIC 2012",
pages = "524--527",
booktitle = "European Microwave Week 2012",
note = "7th European Microwave Integrated Circuits Conference, EuMIC 2012 - Held as Part of 15th European Microwave Week, EuMW 2012 ; Conference date: 29-10-2012 Through 30-10-2012",
}