Keyphrases
Thin-film Resonator
100%
Suspended Film
100%
RF Bandpass Filter
100%
AlN Thin Film
75%
Resonant Frequency
50%
RF Magnetron Sputtering
25%
Partial Pressure
25%
Deposition Parameters
25%
Piezoelectric Response
25%
Metal Substrate
25%
AlN Film
25%
SOI Technology
25%
Piezoelectric AlN
25%
Keff
25%
Surface Micromachining Process
25%
Metal Target
25%
Engineering
Thin Films
100%
Resonator
100%
Bandpass Filter
100%
Piezoelectric
28%
Q Factor
28%
Resonant Frequency
28%
Magnetron
14%
Partial Pressure
14%
Deposition Parameter
14%
Surface Micro-Machining
14%
Metal Target
14%
Material Science
Thin Films
100%
Resonator
100%
Aluminum Nitride
71%
Piezoelectricity
28%
Film
14%
Micromachining
14%
Surface (Surface Science)
14%