@inproceedings{24871d30ce2744289065e335bd332558,
title = "Failure analysis of latent damage in low temperature poly-silicon TFT for OLED applications",
abstract = "Optical microscope and FIB were widely used to find out defect locations in display panels. But failure analysis of LTPS TFTs is getting more difficult to detect the locations than that of (a-Si:H) TFTs. We adopted FIB and EMMI tool and found the leakage path on some special function failure such as line defect in display panel. Analysis results would help to find out defects and improve the yield by introducing right analysis method of FIB/EMMI tools in display panels.",
author = "Kim, {Dong Sun} and Lim, {Chun Bae} and Jung, {Seung Won} and Oh, {Du Seok} and Kim, {Hyung Tae} and Ho, {Won Joon} and Jung, {Ju Young} and Shim, {Jong Pil} and Kim, {Tae Young} and Suh, {Kwang S.}",
year = "2012",
doi = "10.1109/IPFA.2012.6306314",
language = "English",
isbn = "9781467309806",
series = "Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA",
booktitle = "2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2012",
note = "2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2012 ; Conference date: 02-07-2012 Through 06-07-2012",
}