Field emission characteristics of cesiated amorphous carbon films by negative carbon ion

Dong Won Han, Yong Hwan Kim, Dong Jun Choi, Eung Joon Chi, Woo Young Yoon, Hong Koo Baik

Research output: Contribution to journalConference articlepeer-review


Amorphous carbon (a-C) films and cesiated a-C films were synthesized on silicon substrate by Cs ion gun sputter deposition system (Cs IGSDS). The properties of a-C film were analyzed by X-ray photoelectron spectroscopy, Raman spectroscopy, and atomic force microscopy, As the negative carbon ion energy increased, relative sp3 ratio in the a-C film increased, and surface roughness decreased. The field emission characteristics of the a-C films as a function of negative carbon ion energy were examined by diode type I-V measurement at ultra high vacuum system. From I-V measurements, the threshold voltage increased with the increase of negative carbon ion energy, and the range from 11 to 16 V/μm was obtained. To investigate the Cs effect, cesiated a-C films were prepared by Cs+ ion and C- ion co-deposition and field emission characteristics of the cesiated a-C films were observed, too. Compared to non-cesiated a-C films, the threshold voltage is decreased by the Cs co-deposition and the value was about 6 V/μm. In this study, we investigate that the relation between carbon ion energy and field emission, and the effect of Cs in the a-C films were examined.

Original languageEnglish
Pages (from-to)199-204
Number of pages6
JournalThin Solid Films
Publication statusPublished - 1999 Nov 1
Externally publishedYes
EventProceedings of the 1999 26th International Conference on Metallurgic Coatings and Thin Films - San Diego, CA, USA
Duration: 1999 Apr 121999 Apr 15

Bibliographical note

Funding Information:
This study was supported by the University-Industry Collaborative Research Grants of the Korea Science and Engineering Foundation, Republic of Korea under contract 97-2-06-03-01-2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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