Field emission induced fabrication of nanostructures on Au thin films using a noncontact mode atomic force microscope

Kang Ho Park; Jeongyong Kim; Jeong Sook Ha; Ki Bong Song

doi:10.1116/1.1587138

Field emission induced fabrication of nanostructures on Au thin films using a noncontact mode atomic force microscope

Kang Ho Park, Jeongyong Kim, Jeong Sook Ha, Ki Bong Song

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

A reliable nanofabrication on Au cluster films using an atomic force microscope (AFM) was presented. Noncontact mode of AFM equipped with W ₂C coated tip was used. Field emission current amounting to ∼500 pA was observed. Dots and lines having widths as small as 50 nm were created.

Original language	English
Pages (from-to)	1357-1360
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	4
DOIs	https://doi.org/10.1116/1.1587138
Publication status	Published - 2003

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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title = "Field emission induced fabrication of nanostructures on Au thin films using a noncontact mode atomic force microscope",

abstract = "A reliable nanofabrication on Au cluster films using an atomic force microscope (AFM) was presented. Noncontact mode of AFM equipped with W 2C coated tip was used. Field emission current amounting to ∼500 pA was observed. Dots and lines having widths as small as 50 nm were created.",

author = "Park, {Kang Ho} and Jeongyong Kim and Ha, {Jeong Sook} and Song, {Ki Bong}",

year = "2003",

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AU - Park, Kang Ho

AU - Kim, Jeongyong

AU - Ha, Jeong Sook

AU - Song, Ki Bong

PY - 2003

Y1 - 2003

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AB - A reliable nanofabrication on Au cluster films using an atomic force microscope (AFM) was presented. Noncontact mode of AFM equipped with W 2C coated tip was used. Field emission current amounting to ∼500 pA was observed. Dots and lines having widths as small as 50 nm were created.

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U2 - 10.1116/1.1587138

DO - 10.1116/1.1587138

M3 - Article

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JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 4

ER -

Field emission induced fabrication of nanostructures on Au thin films using a noncontact mode atomic force microscope

Abstract

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