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Field emission properties of ta-C films with nitrogen doping

  • Kyu Chang Park*
  • , Jong Hyun Moon
  • , Suk Jae Chung
  • , Jae Hoon Jung
  • , Byeong Kwon Ju
  • , Myung Hwan Oh
  • , W. I. Milne
  • , Min Koo Han
  • , Jin Jang
  • *Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

Abstract

We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi-level shifts toward the conduction band and thus the work function decreases by N doping in ta-C, however the emission currents of doped ta-C films are less than those of undoped ta-C.

Original languageEnglish
Pages298-302
Number of pages5
Publication statusPublished - 1996
Externally publishedYes
EventProceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC - St.Petersburg, Russia
Duration: 1996 Jul 71996 Jul 12

Other

OtherProceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC
CitySt.Petersburg, Russia
Period96/7/796/7/12

ASJC Scopus subject areas

  • Surfaces and Interfaces

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