Fluorine contamination in yttrium-doped barium zirconate film deposited by atomic layer deposition

Jihwan An, Young Beom Kim, Joong Sun Park, Joon Hyung Shim, Turgut M. Gür, Fritz B. Prinz

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


The authors have investigated the change of chemical composition, crystallinity, and ionic conductivity in fluorine contaminated yttrium-doped barium zirconate (BYZ) fabricated by atomic layer deposition (ALD). It has been identified that fluorine contamination can significantly affect the conductivity of the ALD BYZ. The authors have also successfully established the relationship between process temperature and contamination and the source of fluorine contamination, which was the perfluoroelastomer O-ring used for vacuum sealing. The total removal of fluorine contamination was achieved by using all-metal sealed chamber instead of O-ring seals.

Original languageEnglish
Article number01A161
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number1
Publication statusPublished - 2012 Jan

Bibliographical note

Funding Information:
J.A. gratefully acknowledges the financial support from Kwanjeong Educational Foundation. J.A. also acknowledges Munekazu Motoyama for valuable discussions. J.H.S. is grateful to the Fusion Research Program for Green Technologies through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (Grant No. 2011-0019300) for their financial support. T.M.G. and F.B.P. gratefully acknowledge partial support from the Center on Nanostructuring for Efficient Energy Conversion (CNEEC) at Stanford University, an Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences under Award Number DE-SC0001060.

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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