Formation of Au nano-patterns on various substrates using simplified nano-transfer printing method

Jong Woo Kim, Ki Yeon Yang, Sung Hoon Hong, Heon Lee

Research output: Contribution to journalArticlepeer-review

44 Citations (Scopus)


For future device applications, fabrication of the metal nano-patterns on various substrates, such as Si wafer, non-planar glass lens and flexible plastic films become important. Among various nano-patterning technologies, nano-transfer print method is one of the simplest techniques to fabricate metal nano-patterns. In nano-transfer printing process, thin Au layer is deposited on flexible PDMS mold, containing surface protrusion patterns, and the Au layer is transferred from PDMS mold to various substrates due to the difference of bonding strength of Au layer to PDMS mold and to the substrate. For effective transfer of Au layer, self-assembled monolayer, which has strong bonding to Au, is deposited on the substrate as a glue layer. In this study, complicated SAM layer coating process was replaced to simple UV/ozone treatment, which can activates the surface and form the -OH radicals. Using simple UV/ozone treatments on both Au and substrate, Au nano-pattern can be successfully transferred to as large as 6 in. diameter Si wafer, without SAM coating process. High fidelity transfer of Au nano-patterns to non-planar glass lens and flexible PET film was also demonstrated. Crown

Original languageEnglish
Pages (from-to)5607-5611
Number of pages5
JournalApplied Surface Science
Issue number17
Publication statusPublished - 2008 Jun 30


  • Au nano-pattern
  • Flexible PET film
  • Large area patterning
  • Nano-transfer print method
  • Non-planar glass lens
  • Self-assembled monolayer (SAM) coating
  • UV/ozone treatment

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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