Functional microscopy tip fabrication by an electric conductive nanowire

Joondong Kim, Ju Hyung Yun, Moon Seop Hyun, Young Hyun Shin, Yun Chang Park, Ji Hye Lee, Sohee Jeong, Chang Soo Han

Research output: Contribution to journalArticlepeer-review


The functional microscopy tip was fabricated by an electric conductive nanowire (NW). Single crystalline nickel suicide (NiSi) NW grown by plasma-enhanced chemical vapor deposition has an excellent electrical conductivity. On behalf of the advantages in tiny size and conductivity of NiSi NW, it was utilized as a nanoscale probe. Dielectrophoretic method was applied to position the NW. The NiSi NW containing solution was dropped in an ac electric field applying system to align the NiSi NW on a Si cantilever. The fabricated NiSi NW-sitting functional microscopy tip obtained the information of topography and electrical signals from a nanoscale structure. It shows the high potential of nanoscale microscopy tip fabrication at reduced processing steps.

Original languageEnglish
Pages (from-to)3207-3210
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Issue number5
Publication statusPublished - 2010 May
Externally publishedYes


  • Dielectrophoresis (DEP)
  • Functional microscopy tip
  • Nanoscale information
  • Nickel silicide nanowire (NiSi NW)
  • Plasma enhanced chemical vapor deposition (PECVD)

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics


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