GaZnO as a transparent electrode to silicon carbide

Jung Ho Lee, Ji Hong Kim, Kang Min Do, Byung Moo Moon, Sung Jae Joo, Wook Bahng, Sang Cheol Kim, Nam Kyun Kim, Sang Mo Koo

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    The characteristics of Ga-doped zinc oxide (GaZnO) thin films deposited at different substrate temperatures (TS∼250 to 550°C) on 4H-SiC have been investigated. Structural and electrical properties of GaZnO thin film on n-type 4H-SiC (100)were investigated by using x-ray diffraction, atomic force microscopy (AFM), Hall effect measurement, and Auger electron spectroscopy (AES). Hall mobility is found to increase as the substrate temperature increase from 250 to 550 °C, whereas the lowest resistivity (∼3.3 × 10 -4 Ωcm) and highest carrier concentration (∼1. 33×1021cm-3) values are observed for the GaZnO films deposited at 400 °C. It has been found that the c-axis oriented crystalline quality as well as the relative amount of activated Ga3+ ions may affect the electrical properties of GaZnO films on SiC.

    Original languageEnglish
    Title of host publicationSilicon Carbide and Related Materials 2011, ICSCRM 2011
    EditorsRobert P. Devaty, Michael Dudley, T. Paul Chow, Philip G. Neudeck
    PublisherTrans Tech Publications Ltd
    Pages849-852
    Number of pages4
    ISBN (Print)9783037854198
    DOIs
    Publication statusPublished - 2012
    Event14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011 - Cleveland, OH, United States
    Duration: 2011 Sept 112011 Sept 16

    Publication series

    NameMaterials Science Forum
    Volume717-720
    ISSN (Print)0255-5476
    ISSN (Electronic)1662-9752

    Other

    Other14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011
    Country/TerritoryUnited States
    CityCleveland, OH
    Period11/9/1111/9/16

    Keywords

    • GaZnO
    • SiC
    • Transparent electrode

    ASJC Scopus subject areas

    • General Materials Science
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

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