Germanium for high performance MOSFETs and optical interconnects

Krishna C. Saraswat, Donghyun Kim, Tejas Krishnamohan, Duygii Kuzum, Ali K. Okyay, Abhijit Pethe, Hyun Yong Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

19 Citations (Scopus)


It is believed that to continue the scaling of silicon CMOS innovative device structures and new materials have to be created in order to continue the historic progress in information processing and transmission. Recently germanium has emerged as a viable candidate to augment Si for CMOS and optoelectronic applications. In this work we will first review recent results on growth of thin and thick films of Ge on Si, technology for appropriate cleaning of Ge, surface passivation using high-κ dielectrics, and metal induced crystallization of amorphous Ge and dopant activation. Next we will review application of Ge for high performance MOSFETs. Innovative Si/Ge MOS heterostructures will be described with high on current and low off currents. Finally we will describe optical detectors and modulators for on-chip and off-chip interconnect. Successful integration of Ge on Si should allow continued scaling of silicon CMOS to below 22 nm node.

Original languageEnglish
Title of host publicationECS Transactions - SiGe, Ge, and Related Compounds 3
Subtitle of host publicationMaterials, Processing, and Devices
PublisherElectrochemical Society Inc.
Number of pages10
ISBN (Print)9781566776561
Publication statusPublished - 2009
Externally publishedYes
Event3rd SiGe, Ge, and Related Compounds: Materials, Processing and Devices Symposium - 214th ECS Meeting - Honolulu, HI, United States
Duration: 2008 Oct 122008 Oct 17

Publication series

NameECS Transactions
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737


Other3rd SiGe, Ge, and Related Compounds: Materials, Processing and Devices Symposium - 214th ECS Meeting
Country/TerritoryUnited States
CityHonolulu, HI

ASJC Scopus subject areas

  • General Engineering


Dive into the research topics of 'Germanium for high performance MOSFETs and optical interconnects'. Together they form a unique fingerprint.

Cite this