Glancing angle deposited WO3 nanostructures for enhanced sensitivity and selectivity to NO2 in gas mixture

Hi Gyu Moon, Soo Deok Han, Min Gyu Kang, Woo Suk Jung, Beomjin Kwon, Chulki Kim, Taikjin Lee, Seok Lee, Seoung Hyub Baek, Jin Sang Kim, Hyung Ho Park, Chong Yun Kang

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)


We report the facile synthesis and the chemoresistive performances of villi-like WO3 nanostructures (VLWNs) which were fabricated by RF sputter with glancing angle deposition (GAD) mode. A fast deposition of GAD effectively forms self-assembled anisotropic nanostructures with high porosity and surface-to-volume ratio. The sensing tests were examined for NO2 detection in dry air and a mixture of reducing gases. As a result, these sensors at 200 °C exhibit an highly selective and sensitive NO2 detection down to 800 parts per trillion (ppt) level, and could also respond well to NO2 in the concentration range of 0.2-1 parts per million (ppm) without the interference of gas mixture. These results show that the enhanced sensing properties to NO2 are attributed to the highly efficient surface modulation by double potential barriers at nano-necks of WO3 nanostructures.

Original languageEnglish
Pages (from-to)92-99
Number of pages8
JournalSensors and Actuators, B: Chemical
Publication statusPublished - 2016 Jun 28

Bibliographical note

Publisher Copyright:
© 2016 Elsevier B.V. All rights reserved.


  • Chemoresistive NO sensors
  • Glancing angle deposition
  • Nano-necks
  • Tungsten oxide
  • Villi-like nanostructures

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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