Graphoepitaxial Assembly of Block Copolymer for Bending Stripe Patterns

June Huh, Mi Jeong Kim, Jong Wan Park

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

The formation of bend patterns using block copolymer (BCP) lamellae within trench-type groove patterned with bend geometry is simulated by using a Monte Carlo simulation and a strong segregation theory. A tolerance of curvatures at the bend corners of the guide pattern for the formation of bent lamellae is proposed. It is found from the simulation and the strong segregation theory that the tolerance for the difference in curvature radii of two bend corners for the well-patterned lamellar bends is proportional to the inverse of the trench width in the straight region.

Original languageEnglish
Article number1900009
JournalMacromolecular Theory and Simulations
Volume28
Issue number4
DOIs
Publication statusPublished - 2019 Jul

Bibliographical note

Funding Information:
This work was supported by a grant from the National Research Foundation of Korea (2017R1A4A1015015 and 2018M3D1A1058536) and Samsung Advanced Institute of Technology. This work was initiated by the support from Samsung Advanced Institute of Technology when J.H. was affiliated with Department of Material Science and Engineering, Yonsei University.

Publisher Copyright:
© 2019 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

Keywords

  • block copolymer
  • directed self-assembly
  • monte carlo simulation
  • nanopatterning

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Organic Chemistry
  • Polymers and Plastics
  • Inorganic Chemistry
  • Materials Chemistry

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