Growth and electrical properties of multidimensional tungsten nano-buliding blocks

Yun Hi Lee, Dong Ho Kim, Chang Hoon Choi, Yoon Taek Jang, Byeong Kwon Ju

    Research output: Contribution to journalArticlepeer-review

    10 Citations (Scopus)

    Abstract

    We report the demonstration of tungsten nanoblocks such as nanorods, nanoblocks, and nanocylinders through a simple thermal process of sputtered W films. The formation of various types of tungsten nanostructures was based on the difference in the magnitude of the residual film stress and in its spatial distribution, which depends on the deposition pressure during the sputter deposition of self-catalytic W thin film. The resulting shapes displayed well-controlled structures that have characteristic dimensionalities such as zero-dimensional dot, one-dimensional wire, and two-dimensional nanosheet with the deposition pressure. The results demonstrate the possibility of construction of in situ multidimensional achitectures through the one-step thermal process which uses a self-catalytic function of each thin film.

    Original languageEnglish
    Pages (from-to)5977-5979
    Number of pages3
    JournalApplied Physics Letters
    Volume85
    Issue number24
    DOIs
    Publication statusPublished - 2004 Dec 13

    Bibliographical note

    Funding Information:
    This work was supported by the Nano Core Technology(III) of the MOST in Korea, IMT 2000 Program, and partially by ITRC Project.

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

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