Heat treatment effects on mechanical properties of Ni–Co alloy thin films

S. J. Kim, H. W. Jung, M. W. Lee, Y. J. Kim, Y. H. Huh, J. H. Park

    Research output: Contribution to journalArticlepeer-review

    3 Citations (Scopus)

    Abstract

    Vertical type probe is made by microelectromechanical system (MEMS) process in microscale for high degree of integration and performance. To design reliable probe before manufacturing, mechanical properties in microscale is needed. Also, manufactured probe is heat-treated to release residual stress. In this paper, to understand mechanical properties and heat treatment effect in microscale, tensile tests for Ni–Co alloy thin film is performed using specimen with heat-treated under air. The Ni–Co thin film has some enhanced mechanical properties by heat effect and becomes brittle. The changes of grain size distribution and grain direction are observed through electron back-scattered diffraction (EBSD).

    Original languageEnglish
    Pages (from-to)1589-1595
    Number of pages7
    JournalMechanics of Advanced Materials and Structures
    Volume26
    Issue number19
    DOIs
    Publication statusPublished - 2019

    Bibliographical note

    Publisher Copyright:
    © 2018, © 2018 Taylor & Francis Group, LLC.

    Keywords

    • Ni–Co thin film
    • heat treatment effect
    • mechanical property
    • microscale tensile test
    • probe

    ASJC Scopus subject areas

    • Civil and Structural Engineering
    • General Mathematics
    • General Materials Science
    • Mechanics of Materials
    • Mechanical Engineering

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