Heat treatment effects on mechanical properties of Ni–Co alloy thin films

S. J. Kim; H. W. Jung; M. W. Lee; Y. J. Kim; Y. H. Huh; J. H. Park

doi:10.1080/15376494.2018.1444217

Heat treatment effects on mechanical properties of Ni–Co alloy thin films

S. J. Kim, H. W. Jung, M. W. Lee, Y. J. Kim, Y. H. Huh, J. H. Park

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Vertical type probe is made by microelectromechanical system (MEMS) process in microscale for high degree of integration and performance. To design reliable probe before manufacturing, mechanical properties in microscale is needed. Also, manufactured probe is heat-treated to release residual stress. In this paper, to understand mechanical properties and heat treatment effect in microscale, tensile tests for Ni–Co alloy thin film is performed using specimen with heat-treated under air. The Ni–Co thin film has some enhanced mechanical properties by heat effect and becomes brittle. The changes of grain size distribution and grain direction are observed through electron back-scattered diffraction (EBSD).

Original language	English
Pages (from-to)	1589-1595
Number of pages	7
Journal	Mechanics of Advanced Materials and Structures
Volume	26
Issue number	19
DOIs	https://doi.org/10.1080/15376494.2018.1444217
Publication status	Published - 2019

Bibliographical note

Publisher Copyright:
© 2018, © 2018 Taylor & Francis Group, LLC.

Keywords

Ni–Co thin film
heat treatment effect
mechanical property
microscale tensile test
probe

ASJC Scopus subject areas

Civil and Structural Engineering
General Mathematics
General Materials Science
Mechanics of Materials
Mechanical Engineering

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10.1080/15376494.2018.1444217

Cite this

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title = "Heat treatment effects on mechanical properties of Ni–Co alloy thin films",

abstract = "Vertical type probe is made by microelectromechanical system (MEMS) process in microscale for high degree of integration and performance. To design reliable probe before manufacturing, mechanical properties in microscale is needed. Also, manufactured probe is heat-treated to release residual stress. In this paper, to understand mechanical properties and heat treatment effect in microscale, tensile tests for Ni–Co alloy thin film is performed using specimen with heat-treated under air. The Ni–Co thin film has some enhanced mechanical properties by heat effect and becomes brittle. The changes of grain size distribution and grain direction are observed through electron back-scattered diffraction (EBSD).",

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author = "Kim, {S. J.} and Jung, {H. W.} and Lee, {M. W.} and Kim, {Y. J.} and Huh, {Y. H.} and Park, {J. H.}",

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AU - Kim, S. J.

AU - Jung, H. W.

AU - Lee, M. W.

AU - Kim, Y. J.

AU - Huh, Y. H.

AU - Park, J. H.

PY - 2019

Y1 - 2019

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AB - Vertical type probe is made by microelectromechanical system (MEMS) process in microscale for high degree of integration and performance. To design reliable probe before manufacturing, mechanical properties in microscale is needed. Also, manufactured probe is heat-treated to release residual stress. In this paper, to understand mechanical properties and heat treatment effect in microscale, tensile tests for Ni–Co alloy thin film is performed using specimen with heat-treated under air. The Ni–Co thin film has some enhanced mechanical properties by heat effect and becomes brittle. The changes of grain size distribution and grain direction are observed through electron back-scattered diffraction (EBSD).

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KW - heat treatment effect

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KW - microscale tensile test

KW - probe

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JF - Mechanics of Advanced Materials and Structures

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ER -

Heat treatment effects on mechanical properties of Ni–Co alloy thin films

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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