High-Fidelity, Sub-5 nm Patterns from High-χ Block Copolymer Films with Vapor-Deposited Ultrathin, Cross-Linked Surface-Modification Layers

  • Hyun Suk Wang
  • , Seula Oh
  • , Junhwan Choi
  • , Wontae Jang
  • , Ki Hyun Kim
  • , Carlos Luis Arellano
  • , June Huh
  • , Joona Bang*
  • , Sung Gap Im
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    39 Citations (Scopus)

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    Keyphrases

    Engineering

    Material Science

    Chemical Engineering