High-Fidelity, Sub-5 nm Patterns from High-χ Block Copolymer Films with Vapor-Deposited Ultrathin, Cross-Linked Surface-Modification Layers

Hyun Suk Wang, Seula Oh, Junhwan Choi, Wontae Jang, Ki Hyun Kim, Carlos Luis Arellano, June Huh, Joona Bang, Sung Gap Im

    Research output: Contribution to journal › Article › peer-review

    34 Citations (Scopus)

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    Engineering

    Material Science

    Chemical Engineering