High-Fidelity, Sub-5 nm Patterns from High-χ Block Copolymer Films with Vapor-Deposited Ultrathin, Cross-Linked Surface-Modification Layers
- Hyun Suk Wang
- , Seula Oh
- , Junhwan Choi
- , Wontae Jang
- , Ki Hyun Kim
- , Carlos Luis Arellano
- , June Huh
- , Joona Bang*
- , Sung Gap Im
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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