High-frequency micromechanical resonators from aluminium-carbon nanotube nanolaminates

Jung Hoon Bak, Young Duck Kim, Seung Sae Hong, Byung Yang Lee, Seung Ran Lee, Jae Hyuck Jang, Miyoung Kim, Kookrin Char, Seunghun Hong, Yun Daniel Park

Research output: Contribution to journalArticlepeer-review

45 Citations (Scopus)


At micro- and nanoscales, materials with high Youngs moduli and low densities are of great interest for high-frequency micromechanical resonator devices. Incorporating carbon nanotubes (CNTs), with their unmatched properties, has added functionality to many man-made composites. We report on the fabrication of 100-nm-thick laminates by sputter-deposition of aluminium onto a two-dimensional single-walled CNT network. These nanolaminatescomposed of Al, its native oxide Al"2O"3 and CNTsare fashioned, in a scalable manner, into suspended doubly clamped micromechanical beams. Dynamic flexural measurements show marked increases in resonant frequencies for nanolaminates with Al-CNT laminae. Such increases, further supported by quasi-static flexural measurements, are partly attributable to enhancements in elastic properties arising from the addition of CNTs. As a consequence, these nanolaminate micromechanical resonators show significant suppression of mechanical nonlinearity and enhanced strength, both of which are advantageous for practical applications and analogous to biological nanocomposites, similarly composed of high-aspect-ratio, mechanically superior mineral platelets in a soft protein matrix.

Original languageEnglish
Pages (from-to)459-463
Number of pages5
JournalNature Materials
Issue number6
Publication statusPublished - 2008
Externally publishedYes

ASJC Scopus subject areas

  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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