High-performance metal-insulator-metal capacitors using amorphous BASm₂Ti₄O₁₂ thin film

Keyphrases

• High Performance 100%
• Metal-insulator-metal Capacitor 100%
• Low Leakage Current 33%
• Leakage Current Density 33%
• Dielectric Properties 33%
• Capacitance Density 33%
• High Capacitance 33%
• Voltage Coefficient of Capacitance 33%
• Temperature Coefficient of Capacitance 33%
• Linear Voltages 33%

Material Science

• Thin Films 100%
• Film 100%
• Capacitor 100%
• Capacitance 60%
• Density 40%
• Dielectric Property 20%