High-resolution parallel multipass laser interferometer with an interference fringe spacing of 15 nm

Jeongmin Lee; Hosang Yoon; Tai Hyun Yoon

doi:10.1016/j.optcom.2010.10.073

High-resolution parallel multipass laser interferometer with an interference fringe spacing of 15 nm

Jeongmin Lee, Hosang Yoon, Tai Hyun Yoon

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

We present a high-resolution laser interferometer based on the parallel multipass configuration with a pair of right-angle prisms to increase the optical fringe subdivision order up to 21. In the experiment, a multipass homodyne Michelson interferometer (MHMI) with the fringe spacing of 15 nm was demonstrated, resulting in the displacement measurement with a measurement resolution of 180 pm limited by the sampling rate of the employed analog-to-digital converter. We show that the ultimate resolution of the demonstrated MHMI scales with 1/N and it is estimated to be 8.7 pm for N=21.

Original language	English
Pages (from-to)	1118-1122
Number of pages	5
Journal	Optics Communications
Volume	284
Issue number	5
DOIs	https://doi.org/10.1016/j.optcom.2010.10.073
Publication status	Published - 2011 Mar 1

Bibliographical note

Funding Information:
This research was supported by the Basic Research and NSL (National Space Lab) Programs through the National Research Foundation of Korea funded by the Ministry of Education, Science and Technology ( 2007-2-C00171 and 2008-2003197 ).

Keywords

High-resolution interferometer
Interference fringe subdivision
Parallel multipass configuration

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Physical and Theoretical Chemistry
Electrical and Electronic Engineering

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10.1016/j.optcom.2010.10.073

Cite this

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title = "High-resolution parallel multipass laser interferometer with an interference fringe spacing of 15 nm",

abstract = "We present a high-resolution laser interferometer based on the parallel multipass configuration with a pair of right-angle prisms to increase the optical fringe subdivision order up to 21. In the experiment, a multipass homodyne Michelson interferometer (MHMI) with the fringe spacing of 15 nm was demonstrated, resulting in the displacement measurement with a measurement resolution of 180 pm limited by the sampling rate of the employed analog-to-digital converter. We show that the ultimate resolution of the demonstrated MHMI scales with 1/N and it is estimated to be 8.7 pm for N=21.",

keywords = "High-resolution interferometer, Interference fringe subdivision, Parallel multipass configuration",

author = "Jeongmin Lee and Hosang Yoon and Yoon, {Tai Hyun}",

note = "Funding Information: This research was supported by the Basic Research and NSL (National Space Lab) Programs through the National Research Foundation of Korea funded by the Ministry of Education, Science and Technology ( 2007-2-C00171 and 2008-2003197 ).",

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doi = "10.1016/j.optcom.2010.10.073",

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AU - Yoon, Hosang

AU - Yoon, Tai Hyun

N1 - Funding Information: This research was supported by the Basic Research and NSL (National Space Lab) Programs through the National Research Foundation of Korea funded by the Ministry of Education, Science and Technology ( 2007-2-C00171 and 2008-2003197 ).

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N2 - We present a high-resolution laser interferometer based on the parallel multipass configuration with a pair of right-angle prisms to increase the optical fringe subdivision order up to 21. In the experiment, a multipass homodyne Michelson interferometer (MHMI) with the fringe spacing of 15 nm was demonstrated, resulting in the displacement measurement with a measurement resolution of 180 pm limited by the sampling rate of the employed analog-to-digital converter. We show that the ultimate resolution of the demonstrated MHMI scales with 1/N and it is estimated to be 8.7 pm for N=21.

AB - We present a high-resolution laser interferometer based on the parallel multipass configuration with a pair of right-angle prisms to increase the optical fringe subdivision order up to 21. In the experiment, a multipass homodyne Michelson interferometer (MHMI) with the fringe spacing of 15 nm was demonstrated, resulting in the displacement measurement with a measurement resolution of 180 pm limited by the sampling rate of the employed analog-to-digital converter. We show that the ultimate resolution of the demonstrated MHMI scales with 1/N and it is estimated to be 8.7 pm for N=21.

KW - High-resolution interferometer

KW - Interference fringe subdivision

KW - Parallel multipass configuration

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JF - Optics Communications

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High-resolution parallel multipass laser interferometer with an interference fringe spacing of 15 nm

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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