High resolution selective multilayer laser processing by nanosecond laser ablation of metal nanoparticle films

Seung H. Ko; Heng Pan; David J. Hwang; Jaewon Chung; Sangil Ryu; Costas P. Grigoropoulos; Dimos Poulikakos

doi:10.1063/1.2802302

High resolution selective multilayer laser processing by nanosecond laser ablation of metal nanoparticle films

Seung H. Ko, Heng Pan, David J. Hwang, Jaewon Chung, Sangil Ryu, Costas P. Grigoropoulos, Dimos Poulikakos

Research output: Contribution to journal › Article › peer-review

73 Citations (Scopus)

Abstract

Ablation of gold nanoparticle films on polymer was explored using a nanosecond pulsed laser, with the goal to achieve feature size reduction and functionality not amenable with inkjet printing. The ablation threshold fluence for the unsintered nanoparticle deposit was at least ten times lower than the reported threshold for the bulk film. This could be explained by the combined effects of melting temperature depression, lower conductive heat transfer loss, strong absorption of the incident laser beam, and the relatively weak bonding between nanoparticles. The ablation physics were verified by the nanoparticle sintering characterization, ablation threshold measurement, time resolved ablation plume shadowgraphs, analysis of ablation ejecta, and the measurement and calculation of optical properties. High resolution and clean feature fabrication with small energy and selective multilayer processing are demonstrated.

Original language	English
Article number	093102
Journal	Journal of Applied Physics
Volume	102
Issue number	9
DOIs	https://doi.org/10.1063/1.2802302
Publication status	Published - 2007

Bibliographical note

Funding Information:
Financial support to the University of California, Berkeley by the U.S. NSF (CTS-0417563 and CMMI-0700827) and to the Swiss Federal Institute of Technology in Zurich by the Swiss National Science Foundation (2000-063580.00) is gratefully acknowledged.

ASJC Scopus subject areas

General Physics and Astronomy

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10.1063/1.2802302

Cite this

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title = "High resolution selective multilayer laser processing by nanosecond laser ablation of metal nanoparticle films",

abstract = "Ablation of gold nanoparticle films on polymer was explored using a nanosecond pulsed laser, with the goal to achieve feature size reduction and functionality not amenable with inkjet printing. The ablation threshold fluence for the unsintered nanoparticle deposit was at least ten times lower than the reported threshold for the bulk film. This could be explained by the combined effects of melting temperature depression, lower conductive heat transfer loss, strong absorption of the incident laser beam, and the relatively weak bonding between nanoparticles. The ablation physics were verified by the nanoparticle sintering characterization, ablation threshold measurement, time resolved ablation plume shadowgraphs, analysis of ablation ejecta, and the measurement and calculation of optical properties. High resolution and clean feature fabrication with small energy and selective multilayer processing are demonstrated.",

author = "Ko, {Seung H.} and Heng Pan and Hwang, {David J.} and Jaewon Chung and Sangil Ryu and Grigoropoulos, {Costas P.} and Dimos Poulikakos",

note = "Funding Information: Financial support to the University of California, Berkeley by the U.S. NSF (CTS-0417563 and CMMI-0700827) and to the Swiss Federal Institute of Technology in Zurich by the Swiss National Science Foundation (2000-063580.00) is gratefully acknowledged.",

year = "2007",

doi = "10.1063/1.2802302",

language = "English",

volume = "102",

journal = "Journal of Applied Physics",

issn = "0021-8979",

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AU - Chung, Jaewon

AU - Ryu, Sangil

AU - Grigoropoulos, Costas P.

AU - Poulikakos, Dimos

N1 - Funding Information: Financial support to the University of California, Berkeley by the U.S. NSF (CTS-0417563 and CMMI-0700827) and to the Swiss Federal Institute of Technology in Zurich by the Swiss National Science Foundation (2000-063580.00) is gratefully acknowledged.

PY - 2007

Y1 - 2007

N2 - Ablation of gold nanoparticle films on polymer was explored using a nanosecond pulsed laser, with the goal to achieve feature size reduction and functionality not amenable with inkjet printing. The ablation threshold fluence for the unsintered nanoparticle deposit was at least ten times lower than the reported threshold for the bulk film. This could be explained by the combined effects of melting temperature depression, lower conductive heat transfer loss, strong absorption of the incident laser beam, and the relatively weak bonding between nanoparticles. The ablation physics were verified by the nanoparticle sintering characterization, ablation threshold measurement, time resolved ablation plume shadowgraphs, analysis of ablation ejecta, and the measurement and calculation of optical properties. High resolution and clean feature fabrication with small energy and selective multilayer processing are demonstrated.

AB - Ablation of gold nanoparticle films on polymer was explored using a nanosecond pulsed laser, with the goal to achieve feature size reduction and functionality not amenable with inkjet printing. The ablation threshold fluence for the unsintered nanoparticle deposit was at least ten times lower than the reported threshold for the bulk film. This could be explained by the combined effects of melting temperature depression, lower conductive heat transfer loss, strong absorption of the incident laser beam, and the relatively weak bonding between nanoparticles. The ablation physics were verified by the nanoparticle sintering characterization, ablation threshold measurement, time resolved ablation plume shadowgraphs, analysis of ablation ejecta, and the measurement and calculation of optical properties. High resolution and clean feature fabrication with small energy and selective multilayer processing are demonstrated.

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High resolution selective multilayer laser processing by nanosecond laser ablation of metal nanoparticle films

Abstract

Bibliographical note

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