High sensitive NO 2 gas sensor with low power consumption using selectively grown ZnO nanorods

S. J. Park; J. Park; H. Y. Lee; S. E. Moon; K. H. Park; J. Kim; S. Maeng; F. Udrea; W. I. Milne; G. T. Kim

doi:10.1166/jnn.2010.2261

High sensitive NO ₂ gas sensor with low power consumption using selectively grown ZnO nanorods

S. J. Park, J. Park, H. Y. Lee, S. E. Moon, K. H. Park, J. Kim, S. Maeng, F. Udrea, W. I. Milne, G. T. Kim

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

The noble gas sensor using multiple ZnO nanorods was fabricated with CMOS compatible process and sol-gel growth method on selective area and gas response characteristics to NO ₂ gas of the sensor device were investigated. We confirmed the sensors had high sensitive response denoted by the sensitivity of several tens for NO ₂ gas sensing and also showed pretty low power consumption close to 20 mW even though the recovery of resistance come up to almost the initial value.

Original language	English
Pages (from-to)	3385-3388
Number of pages	4
Journal	Journal of Nanoscience and Nanotechnology
Volume	10
Issue number	5
DOIs	https://doi.org/10.1166/jnn.2010.2261
Publication status	Published - 2010 May

Keywords

Micro heater
Semiconducting gas sensor
Sol-Gel growth method
ZnO nanorods

ASJC Scopus subject areas

Bioengineering
Chemistry(all)
Biomedical Engineering
Materials Science(all)
Condensed Matter Physics

Access to Document

10.1166/jnn.2010.2261

Cite this

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title = "High sensitive NO 2 gas sensor with low power consumption using selectively grown ZnO nanorods",

abstract = "The noble gas sensor using multiple ZnO nanorods was fabricated with CMOS compatible process and sol-gel growth method on selective area and gas response characteristics to NO 2 gas of the sensor device were investigated. We confirmed the sensors had high sensitive response denoted by the sensitivity of several tens for NO 2 gas sensing and also showed pretty low power consumption close to 20 mW even though the recovery of resistance come up to almost the initial value.",

keywords = "Micro heater, Semiconducting gas sensor, Sol-Gel growth method, ZnO nanorods",

author = "Park, {S. J.} and J. Park and Lee, {H. Y.} and Moon, {S. E.} and Park, {K. H.} and J. Kim and S. Maeng and F. Udrea and Milne, {W. I.} and Kim, {G. T.}",

year = "2010",

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language = "English",

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AU - Park, S. J.

AU - Park, J.

AU - Lee, H. Y.

AU - Moon, S. E.

AU - Park, K. H.

AU - Kim, J.

AU - Maeng, S.

AU - Udrea, F.

AU - Milne, W. I.

AU - Kim, G. T.

PY - 2010/5

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AB - The noble gas sensor using multiple ZnO nanorods was fabricated with CMOS compatible process and sol-gel growth method on selective area and gas response characteristics to NO 2 gas of the sensor device were investigated. We confirmed the sensors had high sensitive response denoted by the sensitivity of several tens for NO 2 gas sensing and also showed pretty low power consumption close to 20 mW even though the recovery of resistance come up to almost the initial value.

KW - Micro heater

KW - Semiconducting gas sensor

KW - Sol-Gel growth method

KW - ZnO nanorods

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