Keyphrases
High Sensitivity
100%
Polyimide
100%
MEMS Technology
100%
Humidity Sensor
100%
Capacitive Humidity Sensor
100%
Response Time
50%
Top Electrode
50%
Hysteresis
33%
Sensing Layer
33%
Comb-shaped
33%
Cavity Structure
33%
Sensor-based
16%
Sensing Materials
16%
Bottom Electrode
16%
Silicon Wafer
16%
High Resistance
16%
Fill Factor
16%
Error Rate
16%
O2 Plasma
16%
Good Linearity
16%
Contact Area
16%
Humidity Conditions
16%
Capacitance Value
16%
Vapor Absorption
16%
Electrode Passivation
16%
Low Hysteresis
16%
Engineering
Capacitive
100%
Humidity Sensor
100%
Mem Technology
100%
Response Time
37%
Microelectromechanical System
25%
Sensing Layer
25%
Passivation
12%
Silicon Wafer
12%
Error Rate
12%
Fill Factor
12%
Sensing Material
12%
Room Humidity
12%
Material Science
Polyimide
100%
Microelectromechanical System
100%
Capacitance
50%
Silicon Wafer
50%