High sensitivity capacitive humidity sensor with a novel polyimide design fabricated by mems technology

  • Ji Hong Kim*
  • , Sung Min Hong
  • , Jang Sub Lee
  • , Byung Moo Moon
  • , Kunnyun Kim
  • *Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    37 Citations (Scopus)

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    Keyphrases

    Engineering

    Material Science