Abstract
We report the fabrication of a highly sensitive gas sensor based on a network of nanostructured TiO2 hollow hemispheres (NTHH). O 2 plasma etching induces cross-linking of hexagonal-close-packed polystyrene array, which is adopted as a template substrate for room-temperature deposition of TiO2 thin film. High-temperature calcination effectively removes polystyrene template beads and promotes crystallization of TiO2, finally producing cross-linked NTHH via nanobridges. The gas-sensing capability of a NTHH-based sensor is demonstrated using 1-500 ppm CO. Our sensor exhibits a very high response of 4220% change in resistance when exposed to 500 ppm CO at 250 °C, whereas a gas sensor based on a plain TiO2 film shows a 195% change. The high sensitivity of the NTHH-based sensor is attributed to the enhanced gas sensing performance of the narrow nanobridges between hollow hemispheres.
Original language | English |
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Pages (from-to) | 116-121 |
Number of pages | 6 |
Journal | Sensors and Actuators, B: Chemical |
Volume | 149 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2010 Aug 6 |
Externally published | Yes |
Keywords
- CO sensors
- Hollow hemispheres
- Nanostructured
- TiO
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry