Abstract
A novel structure of hybrid bulk acoustic wave (BAW) resonator with low temperature coefficient of frequency (TCF) is presented. Implemented with a pair of quarter-wave reflectors on air-cavity reflector, the hybrid BAW resonator exhibits a TCF of as low as -11.5\ {\rm ppm}/^{\circ}{\rm C} and an effective electro-mechanical coupling coefficient ({\rm kt}^{2}) of 5.1% at the frequency of 2.5 GHz. The hybrid BAW resonator also shows excellent Q-factors of 1627 and 1842 at resonance and anti-resonance frequency, respectively. RF duplexer configured with the hybrid BAW resonators is provided as well. The fabricated RF duplexer for long term evolution (LTE) band-7, which should be designed to prevent the co-existence problem with WiFi having extremely narrow fractional band-gap of 0.7%, achieves an attenuation of 36.8 dB and an insertion loss of 2.4 dB.
Original language | English |
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Article number | 6568974 |
Pages (from-to) | 453-455 |
Number of pages | 3 |
Journal | IEEE Microwave and Wireless Components Letters |
Volume | 23 |
Issue number | 9 |
DOIs | |
Publication status | Published - 2013 |
Keywords
- Bulk acoustic wave (BAW) resonator
- RF duplexer
- RF filter
- temperature coefficient of frequency (TCF)
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering