TY - GEN
T1 - Image-based displacement measurement system for the characterization of mechanical properties of thin films
AU - Ha, Jong Eun
AU - Park, Jun Hyub
AU - An, Joong Hyok
AU - Kim, Yun Jae
PY - 2007
Y1 - 2007
N2 - This paper proposes a method for the direct measurement of displacement through the analysis of image. We designed specimen with indicator for the image-based displacement measurement system. First, illumination system for the simple processing of image is investigated. We found that backlight system gives a high contrast image for measurement. Measurement could be done by finding the positions of 8 rectangular-shape indicators. This is done by the analysis of intensity profile along vertical direction in each region of interest. In each region of interest we find two positions of peaks. Also, for easy setup procedure, region of interest is found automatically through the analysis of edge projection profile along the horizontal direction. Current system uses two types CCD camera with image size of 640x480 pixels and 1600x1200 pixels. The number of pixel is important to resolution of measurement. To gain confidence in reliability of the system, pre-test using the Al-3%Ti thin film was performed, which is widely used in the switches and other MEMS devices. The specimen was fabricated with dimensions of 1000μm long, 1.0μm thickness, and width of 50μm. Tensile tests were performed and measured displacement using the developed system and capacitance type displacement sensor, simultaneously. Current systems are implemented on PC with 2.7GHz CPU with 752Mbyte memory and we can obtain measurements rate of 10Hz. It is possible to measure fatigue property of thin films with easy setup and accuracy by proposed system.
AB - This paper proposes a method for the direct measurement of displacement through the analysis of image. We designed specimen with indicator for the image-based displacement measurement system. First, illumination system for the simple processing of image is investigated. We found that backlight system gives a high contrast image for measurement. Measurement could be done by finding the positions of 8 rectangular-shape indicators. This is done by the analysis of intensity profile along vertical direction in each region of interest. In each region of interest we find two positions of peaks. Also, for easy setup procedure, region of interest is found automatically through the analysis of edge projection profile along the horizontal direction. Current system uses two types CCD camera with image size of 640x480 pixels and 1600x1200 pixels. The number of pixel is important to resolution of measurement. To gain confidence in reliability of the system, pre-test using the Al-3%Ti thin film was performed, which is widely used in the switches and other MEMS devices. The specimen was fabricated with dimensions of 1000μm long, 1.0μm thickness, and width of 50μm. Tensile tests were performed and measured displacement using the developed system and capacitance type displacement sensor, simultaneously. Current systems are implemented on PC with 2.7GHz CPU with 752Mbyte memory and we can obtain measurements rate of 10Hz. It is possible to measure fatigue property of thin films with easy setup and accuracy by proposed system.
KW - Displacement measurement
KW - MLMS
KW - Mechanical property
KW - Thin films
UR - http://www.scopus.com/inward/record.url?scp=34547941222&partnerID=8YFLogxK
U2 - 10.1115/MNC2007-21570
DO - 10.1115/MNC2007-21570
M3 - Conference contribution
AN - SCOPUS:34547941222
SN - 0791842657
SN - 9780791842652
T3 - Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007
SP - 1649
EP - 1654
BT - Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007
T2 - International Conference on Integration and Commercialization of Micro and Nanosystems 2007
Y2 - 10 January 2007 through 13 January 2007
ER -