Impedance characterization of nanogap interdigitated electrode arrays fabricated by tilted angle evaporation for electrochemical biosensor applications

Dae Young Jeon; So Jeong Park; Yongha Kim; Min Ju Shin; Pil Soo Kang; Gyu Tae Kim

doi:10.1116/1.4863512

Impedance characterization of nanogap interdigitated electrode arrays fabricated by tilted angle evaporation for electrochemical biosensor applications

Dae Young Jeon, So Jeong Park, Yongha Kim, Min Ju Shin, Pil Soo Kang, Gyu Tae Kim

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

Nanogap interdigitated electrode (IDE) arrays were fabricated by tilted angle evaporation on dry etch SiO₂ substrates, suggesting a simple, inexpensive, and controllable fabrication technique. The impedance characteristics in a KCl solution clearly showed the differences between nanogap and microscaled IDEs in terms of the peak positions of the phase shift and the ratio of the resistance amplitudes. Moreover, the effect of imperfections on the edge of electrodes was quantitatively discussed through the analysis of electric-field based on finite element method. Our results provide a better understanding of impedance behavior of nanogap IDE arrays for high-performance biochemical applications.

Original language	English
Article number	021803
Journal	Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume	32
Issue number	2
DOIs	https://doi.org/10.1116/1.4863512
Publication status	Published - 2014

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Process Chemistry and Technology
Surfaces, Coatings and Films
Electrical and Electronic Engineering
Materials Chemistry

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Jeon, D. Y., Jeong Park, S., Kim, Y., Shin, M. J., Soo Kang, P., & Kim, G. T. (2014). Impedance characterization of nanogap interdigitated electrode arrays fabricated by tilted angle evaporation for electrochemical biosensor applications. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 32(2), Article 021803. https://doi.org/10.1116/1.4863512

Impedance characterization of nanogap interdigitated electrode arrays fabricated by tilted angle evaporation for electrochemical biosensor applications. / Jeon, Dae Young; Jeong Park, So; Kim, Yongha et al.
In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Vol. 32, No. 2, 021803, 2014.

Research output: Contribution to journal › Article › peer-review

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Impedance characterization of nanogap interdigitated electrode arrays fabricated by tilted angle evaporation for electrochemical biosensor applications

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