Implantation of N ions on sapphire substrate for improvement of GaN epilayer

  • Yong Suk Cho
  • , Junggeun Jhin
  • , Young Ju Park*
  • , Sungchan Cho
  • , Eui Kwan Koh
  • , Eun Kyu Kim
  • , Gyeungho Kim
  • , Dongjin Byun
  • , Suk Ki Min
  • *Corresponding author for this work

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Material Science