Imprinted moth-eye antireflection patterns on glass substrate

Sub-micron sized, conical shaped moth-eye structure was transferred to thermoplastic polymer film, such as polyvinyl chloride (PVC) using hot embossing process. Since master template was made of polycarbonate, embossing temperature and pressure were carefully maintained to 100^oC and 10 atm. Conical shaped moth-eye pattern was reversed to tapered hole pattern on PVC film. Hot embossed PVC film was then used as transparent template for subsequent UV nanoimprint process, in order to form the conical shaped sub-micron moth-eye structure on glass substrate. After thin layer of Si oxide and monolayer of self-assembled, silane based molecules was coated on hot embossed PVC film. UV nanoimprint process was done on the glass substrate using hot embossed PVC film. As a result, the transmittance of glass substrate was increased from 91 to 94% for single side patterned and 96% for both side patterned glass substrate for the spectral range of 350 to 800 nm.